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Home / Accessories for Microscopy / Nanotechnology / Calibration / SEM Calibration / High Resolution Calibration

High Resolution Calibration

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High Resolution Calibration

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High Magnification, High resolution Reference
and Calibration Standards for AFM, SEM, Auger and FIB

Holographic Grating for Scanning Electron Microscopy,
Atomic Force Microscopy, Auger and Focused Ion Beam

Precision, holographic patterns, provide accurate calibration and feature high stability and usability. Moderate ridge heights are convenient for AFM. Specimens provide good contrast for secondary and backscatter imaging with SEM.

They enable accurate calibration for high resolution, nanometer-scale measurements.
Available with 145 and 292nm pitch.

Sample Certificate for 145nm Pitch Calibration Standard

Sample Certificate Non-Traceable

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Product
Description
Order
Product

145nm Pitch Calibration Standard for AFM
145nm AFM Reference Standard, Certified, Non-traceable, Mounted on a 12mm steel disk
no. 642-1AFM

Description

145nm Pitch Calibration Standard for AFM

Precision holographic pattern for accurate calibration for high resolution, nanometer scale measurements.

Period: 145nm pitch nominal, one dimensional array. Accuracy is +/- 1nm. Calibration certificate will give the actual pitch of the standard.
Surface structure: Aluminum lines on glass, 4x6mm dimensions. Line height (about 100nm) and line width (about 75nm) are not calibrated.
Usability: The calibrated pattern covers the entire standard. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 250nm to 10um. Available unmounted or mounted on a 12mm steel AFM disk.
Certification: Comes with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements.
Order

Art.Description Unit PriceQuantity
642-1AFM

145nm Very High Resolution AFM Reference Standard on 12mm steel disk

Each € 1.237,80
✓
spinner
642-1

145nm Very High Resolution AFM Reference Standard, Unmounted

Each € 1.048,20
✓
spinner
Brand: Ted Pella

Product
Description
Order
Product

292nm AFM Reference Standard, Certified, Non-traceable
292nm AFM Reference Standard, Certified, Non-traceable, Mounted on a 12mm disk
no. 643-1AFM

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
Order

Art.Description Unit PriceQuantity
643-1AFM

292nm High Resolution AFM Reference Standard on 12mm steel disk

Each € 1.999,60
✓
spinner
Brand: Ted Pella

Product
Description
SEM Holders
Order
Product

292nm SEM, Auger and FIB Reference Standard, Certified, Non-traceable
no. 643-1 to 643-1R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
643-1

292nm High Resolution AFM Reference Standard, Unmounted

Each € 1.904,30
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643-1A

292nm High Resolution AFM Reference Standard, Mount A

Each € 1.999,60
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643-1B

292nm High Resolution AFM Reference Standard, Mount B

Each € 1.999,60
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643-1C

292nm High Resolution AFM Reference Standard, Mount C

Each € 1.999,60
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spinner
643-1D

292nm High Resolution AFM Reference Standard, Mount D

Each € 1.999,60
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643-1E

292nm High Resolution AFM Reference Standard, Mount E

Each € 1.999,60
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643-1F

292nm High Resolution AFM Reference Standard, Mount F

Each € 1.999,60
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643-1G

292nm High Resolution AFM Reference Standard, Mount G, you supply mount

Each p.o.r.
643-1K

292nm High Resolution AFM Reference Standard, Mount K

Each € 1.999,60
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643-1L

292nm High Resolution AFM Reference Standard, Mount L

Each € 1.999,60
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643-1M

292nm High Resolution AFM Reference Standard, Mount M

Each € 1.999,60
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643-1O

292nm High Resolution AFM Reference Standard, Mount O

Each € 1.999,60
✓
spinner
643-1P

292nm High Resolution AFM Reference Standard, Mount P

Each € 1.999,60
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643-1Q

292nm High Resolution AFM Reference Standard, Mount Q

Each € 1.999,60
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643-1R

292nm High Resolution AFM Reference Standard, Mount R

Each € 1.999,60
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Brand: Ted Pella

Product
Description
Order
Product

292nm AFM Reference Standard, Certified, Traceable, Mounted on disk
292nm AFM Reference Standard, Certified, Traceable, Mounted on a 12mm disk:
no. 643-11AFM

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
Order

Art.Description Unit PriceQuantity
643-11AFM

292nm High Resolution AFM Reference Standard on 12mm steel disk certified

Each € 7.301,20
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Brand: Ted Pella

Product
Description
SEM Holders
Order
Product

292nm SEM, Auger and FIB Reference Standard, Certified, Traceable
no. 643-11 to 643-11R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
643-11

292nm High Resolution AFM Reference Standard, Traceable, Unmounted

Each € 6.669,50
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spinner
643-11A

292nm High Resolution AFM Reference Standard, Traceable, Mount A

Each € 8.268,00
✓
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643-11B

292nm High Resolution AFM Reference Standard, Traceable, Mount B

Each € 9.380,20
✓
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643-11C

292nm High Resolution AFM Reference Standard, Traceable, Mount C

Each € 7.301,20
✓
spinner
643-11D

292nm High Resolution AFM Reference Standard, Traceable, Mount D

Each € 9.270,20
✓
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643-11E

292nm High Resolution AFM Reference Standard, Traceable, Mount E

Each € 8.838,10
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643-11F

292nm High Resolution AFM Reference Standard, Traceable, Mount F

Each € 6.620,30
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643-11G

292nm High Resolution AFM Reference Standard, Traceable, Mount G, you supply mount

Each € 6.440,00
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643-11K

292nm High Resolution AFM Reference Standard, Traceable, Mount K

Each € 6.440,00
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643-11L

292nm High Resolution AFM Reference Standard, Traceable, Mount L

Each € 9.379,90
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643-11M

292nm High Resolution AFM Reference Standard, Traceable, Mount M

Each € 7.799,70
✓
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643-11O

292nm High Resolution AFM Reference Standard, Traceable, Mount O

Each € 8.268,00
✓
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643-11P

292nm High Resolution AFM Reference Standard, Traceable, Mount P

Each € 8.268,00
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643-11Q

292nm High Resolution AFM Reference Standard, Traceable, Mount Q

Each € 6.100,80
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643-11R

292nm High Resolution AFM Reference Standard, Traceable, Mount R

Each € 6.100,80
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Brand: Ted Pella

Contact

Van Loenen Instruments
Penningweg 69 E
1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

BTW/VAT nr. :NL804 608 180 B01
KvK nr. :28038099

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