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High Resolution Calibration

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High Magnification, High resolution Reference and Calibration Standards for AFM, SEM, Auger and FIB

Holographic Grating for Scanning Electron Microscopy, Atomic Force Microscopy, Auger and Focused Ion Beam

Precision, holographic patterns, provide accurate calibration and feature high stability and usability. Moderate ridge heights are convenient for AFM. Specimens provide good contrast for secondary and backscatter imaging with SEM.

They enable accurate calibration for high resolution, nanometer-scale measurements.
Available with 145 and 292nm pitch.

Sample Certificate for 145nm Pitch Calibration Standard

Sample Certificate Non-Traceable

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145nm Pitch Calibration Standard for AFM
145nm AFM Reference Standard, Certified, Non-traceable, Mounted on a 12mm steel disk
Art.
no. 642-1AFM

Description

145nm Pitch Calibration Standard for AFM

Precision holographic pattern for accurate calibration for high resolution, nanometer scale measurements.

Period:	145nm pitch nominal, one dimensional array. Accuracy is +/- 1nm. Calibration certificate will give the actual pitch of the standard.
Surface structure:	Aluminum lines on glass, 4x6mm dimensions. Line height (about 100nm) and line width (about 75nm) are not calibrated.
Usability:	The calibrated pattern covers the entire standard. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:	Use in contact, tapping and other modes with image sizes from 250nm to 10um. Available unmounted or mounted on a 12mm steel AFM disk.
Certification:	Comes with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements.

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Description
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292nm AFM Reference Standard, Certified, Non-traceable
292nm AFM Reference Standard, Certified, Non-traceable, Mounted on a 12mm disk
Art.
no. 643-1AFM

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period:	292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure:	Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability:	The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:	Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB:	Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification:	There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements

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Product
Description
SEM Holders
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Product

292nm SEM, Auger and FIB Reference Standard, Certified, Non-traceable
Art.
no. 643-1 to 643-1R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period:	292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure:	Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability:	The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:	Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB:	Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification:	There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements

SEM Holders

Type	Prod. No.	Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A	16111	Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B	16261	Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C	16221	9.5mm dia. x 9.5mm Cylinder, JEOL
D	16281	15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E	16291	15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F	16111-9	Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G		You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K	16324	15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L	16327	25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M	16231	12.2mm dia. x 10mm Cylinder, JEOL
O	16115	31.7mm dia. x 6.47mm, Cambridge S4 Mount
P	16242	Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q	16153	25mm dia. x 10mm Cylinder, JEOL
R	16144	Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom

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Product
Description
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Product

292nm AFM Reference Standard, Certified, Traceable, Mounted on disk
292nm AFM Reference Standard, Certified, Traceable, Mounted on a 12mm disk:
Art.
no. 643-11AFM

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period:	292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure:	Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability:	The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:	Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB:	Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification:	There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements

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Product
Description
SEM Holders
Order
Product

292nm SEM, Auger and FIB Reference Standard, Certified, Traceable
Art.
no. 643-11 to 643-11R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period:	292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure:	Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability:	The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:	Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB:	Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification:	There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements

SEM Holders

Type	Prod. No.	Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A	16111	Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B	16261	Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C	16221	9.5mm dia. x 9.5mm Cylinder, JEOL
D	16281	15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E	16291	15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F	16111-9	Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G		You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K	16324	15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L	16327	25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M	16231	12.2mm dia. x 10mm Cylinder, JEOL
O	16115	31.7mm dia. x 6.47mm, Cambridge S4 Mount
P	16242	Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q	16153	25mm dia. x 10mm Cylinder, JEOL
R	16144	Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom

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