Products
Etched Si CDMS-XY
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Pelcotec™ Etched Si CDMS-XY Critical Dimension Magnification Standard
Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration.
Fiducial lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.
Available as NIST Traceable or as Certified against NIST Standard
Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).
The Pelcotec™ Etched Si CDMS-XY Calibration Standard is available with two feature size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:
Pelcotec™ Etched Si CDMS-XY-1T
Fully traceable with features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Pelcotec™ Etched Si CDMS-XY-0.1T
Fully traceable with features from 2.0mm to 50nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
Pelcotec™ Etched Si CDMS-XY-1C
Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Pelcotec™ Etched Si CDMS-XY-0.1C
Individually certified against a NIST standard with features from 2.0mm to 50nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
Feature sizes for the Pelcotec™ Etched Si CDMS-XY-1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
Feature sizes for the Pelcotec™ Etched Si CDMS-XY-0.1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm
500nm, 250nm, 100nm and 50nm lines are only on the Etched Si CDMS-XY- 0.1T and 0.1C products
The Pelcotec™ Etched Si CDMS-XY Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precision etched lines for features sets from 100nm to 2µm. Due to its sturdy construction, the CDMS-XY Standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ Etched Si CDMS-XY Calibration Standard has a unique identification number.
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ Etched Si CDMS-XY is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The Etched Si CDMS-XY Standard may also be mounted on a custom mount of your choice.
Store the Pelcotec™ Etched Si CDMS-XY Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
Comparison model 1 and 0.1
| Pelcotec™ Etched Si CDMS-XY-1 |
Pelcotec™ Etched Si CDMS-XY-0.1 |
|
|---|---|---|
| Substrate: High conductivity silicon (resistivity of 0.001 – 0.002 Ohm/cm) | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Unique serial identification number per chip | ||
| Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm | ✓ | ✓ |
| Graticule lines perpendicular to X and Y axes ruled at 10um, 5um, 2um and 1um pitch | ✓ | ✓ |
| High Resolution version only – Additional graticule lines perpendicular to X and Y axes ruled at 500, 250, 100nm and 50nm pitch | — | ✓ |
| Traceable at the wafer level to NIST | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard | C versions | C versions |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
| Line edge roughness of +/- 0.3nm per 1um length of line edge. | ✓ | ✓ |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-1T, Etched Si
2mm-1µm, Traceble
no. 701-1 to 701-1S
Description
NIST traceable* with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
*Uses average data measured for each production wafer.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-0.1T, Etched Si
2mm-50nm, Traceable
no. 702-01 to 702-01S
Description
NIST traceable* with features from 2mm to 50nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
*Uses average data measured for each production wafer.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-1C, Etched Si
2mm-1µm, Certified
no. 705-1 to 705-1S
Description
Certified* against NIST standard with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
*Each scale calibrated against a NIST measured standard
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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Product
Description
SEM Holders
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Product
PELCO CDMS-XY-0.1C, Etched Si
2mm-100nm, Certified
no. 706-01 to 706-01S
Description
Certified* against NIST standard with features from 2mm to 50nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
* Each scale calibrated against a NIST measured standard
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm
SEM Holders
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
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