Products
Etched Si CDMS ISO
Pelcotec™ Etched Si CDMS ISO
Critical Dimension Magnification Standard
Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM
magnification calibration in the X axis from the etched lines.
Available as NIST Traceable or as Certified against NIST Standard
Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).
The Pelcotec™ Etched Si CDMS Calibration Standard is available in two feature size ranges individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.
Pelcotec™ Etched Si CDMS-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Pelcotec™ Etched Si CDMS -0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x – 200,000x; for all SEM and most FE-SEM applications.
* Pelcotec™ Etched Si CDMS-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
* Pelcotec™ Etched Si CDMS-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
Pelcotec™ Technical Notes for CDMS ISO – Critical Dimension Magnification Standards (149KB PDF)
* Recertification in an ISO 17025:2017 accredited calibration laboratory available.
Feature sizes for the Pelcotec™ Etched Si CDMS-1T-IS0 and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm
Feature sizes for the Pelcotec™ Etched Si CDMS-0.1T-ISO and -0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm
500nm, 250nm and 100nm lines are only on the Etched Si CDMS-0.1T-ISO and 0.1C-ISO products
The Pelcotec™ Etched Si CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precision etched lines for features sets from 100nm to 2µm. Due to its sturdy construction, the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ Etched Si CDMS ISO Calibration Standard has a unique identification number.
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ Etched Si CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The Etched Si CDMS standard may also be mounted on a custom mount of your choice.
Store the Pelcotec™ Etched Si CDMS ISO Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
| Pelcotec™ Etched Si CDMS-1-ISO | Pelcotec™ Etched Si CDMS-0.1-ISO | |
|---|---|---|
| Substrate: High conductivity silicon (resistivity of 0.001 – 0.002 Ohm/cm) | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Unique serial identification number per chip | — | ✓ |
| Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm | ✓ | ✓ |
| Graticule lines perpendicular to the X axis ruled at 10µm, 5µm, 2µm and 1µm pitch | ✓ | ✓ |
| High Resolution version only – Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch | — | ✓ |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions | C versions |
| Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available | C versions only | C versions only |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
| Line edge roughness of +/- 0.3nm per 1um length of line edge | ✓ | ✓ |
| Measurements reported with an uncertainty (k=2)* of ±0.012μm | ✓ | ✓ |
Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 707-1 | Pelcotec CDMS-1T-ISO, Unmounted |
Each | € 391,20 | ||
| 707-1A | Pelcotec CDMS-1T-ISO,µmount A |
Each | € 397,30 | ||
| 707-1AFM | Pelcotec CDMS-1T-ISO, 12mm AFM Disc |
Each | € 397,30 | ||
| 707-1B | Pelcotec CDMS-1T-ISO,µmount B |
Each | € 397,30 | ||
| 707-1C | Pelcotec CDMS-1T-ISO,µmount C |
Each | € 397,30 | ||
| 707-1D | Pelcotec CDMS-1T-ISO,µmount D |
Each | € 397,30 | ||
| 707-1E | Pelcotec CDMS-1T-ISO,µmount E |
Each | € 397,30 | ||
| 707-1F | Pelcotec CDMS-1T-ISO,µmount F |
Each | € 397,30 | ||
| 707-1G | Pelcotec CDMS-1T-ISO,µmount G |
Each | p.o.r. | ||
| 707-1K | Pelcotec CDMS-1T-ISO,µmount K |
Each | € 397,30 | ||
| 707-1L | Pelcotec CDMS-1T-ISO,µmount L |
Each | € 397,30 | ||
| 707-1M | Pelcotec CDMS-1T-ISO,µmountµm |
Each | € 397,30 | ||
| 707-1O | Pelcotec CDMS-1T-ISO,µmount O |
Each | € 397,30 | ||
| 707-1P | Pelcotec CDMS-1T-ISO,µmount P |
Each | € 397,30 | ||
| 707-1Q | Pelcotec CDMS-1T-ISO,µmount Q |
Each | € 397,30 | ||
| 707-1R | Pelcotec CDMS-1T-ISO,µmount R |
Each | € 397,30 | ||
| 707-1S | Pelcotec CDMS-1T-ISO,µmount S |
Each | € 397,30 |
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 708-01 | Pelcotec CDMS-0.1T-ISO, Etched Si, Unmounted |
Each | € 1.476,90 | ||
| 708-01A | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount A |
Each | € 1.506,40 | ||
| 708-01AFM | Pelcotec CDMS-0.1T-ISO, Etched Si, 12mm AFM Disc |
Each | € 1.506,40 | ||
| 708-01B | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount B |
Each | € 1.506,40 | ||
| 708-01C | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount C |
Each | € 1.506,40 | ||
| 708-01D | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount D |
Each | € 1.506,40 | ||
| 708-01E | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount E |
Each | € 1.506,40 | ||
| 708-01F | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount F |
Each | € 1.506,40 | ||
| 708-01G | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount G |
Each | p.o.r. | ||
| 708-01K | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount K |
Each | € 1.506,40 | ||
| 708-01L | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount L |
Each | € 1.506,40 | ||
| 708-01M | Pelcotec CDMS-0.1T-ISO, Etched Si,µmountµm |
Each | € 1.506,40 | ||
| 708-01O | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount O |
Each | € 1.506,40 | ||
| 708-01P | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount P |
Each | € 1.506,40 | ||
| 708-01Q | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount Q |
Each | € 1.506,40 | ||
| 708-01R | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount R |
Each | € 1.506,40 | ||
| 708-01S | Pelcotec CDMS-0.1T-ISO, Etched Si,µmount S |
Each | € 1.506,40 |
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #711-1-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 711-1 | Pelcotec CDMS-XY-1C-ISO, Unmounted |
Each | € 2.067,60 | ||
| 711-1A | Pelcotec CDMS-XY-1C-ISO,µmount A |
Each | € 2.097,10 | ||
| 711-1AFM | Pelcotec CDMS-XY-1C-ISO, 12mm AFM Disc |
Each | € 2.097,10 | ||
| 711-1B | Pelcotec CDMS-XY-1C-ISO,µmount B |
Each | € 2.097,10 | ||
| 711-1C | Pelcotec CDMS-XY-1C-ISO,µmount C |
Each | € 2.097,10 | ||
| 711-1D | Pelcotec CDMS-XY-1C-ISO,µmount D |
Each | € 2.097,10 | ||
| 711-1E | Pelcotec CDMS-XY-1C-ISO,µmount E |
Each | € 2.097,10 | ||
| 711-1F | Pelcotec CDMS-XY-1C-ISO,µmount F |
Each | € 2.097,10 | ||
| 711-1G | Pelcotec CDMS-XY-1C-ISO,µmount G |
Each | p.o.r. | ||
| 711-1K | Pelcotec CDMS-XY-1C-ISO,µmount K |
Each | € 2.097,10 | ||
| 711-1L | Pelcotec CDMS-XY-1C-ISO,µmount L |
Each | € 2.097,10 | ||
| 711-1M | Pelcotec CDMS-XY-1C-ISO,µmountµm |
Each | € 2.097,10 | ||
| 711-1O | Pelcotec CDMS-XY-1C-ISO,µmount O |
Each | € 2.097,10 | ||
| 711-1P | Pelcotec CDMS-XY-1C-ISO,µmount P |
Each | € 2.097,10 | ||
| 711-1Q | Pelcotec CDMS-XY-1C-ISO,µmount Q |
Each | € 2.097,10 | ||
| 711-1R | Pelcotec CDMS-XY-1C-ISO,µmount R |
Each | € 2.097,10 | ||
| 711-1S | Pelcotec CDMS-XY-1C-ISO,µmount S |
Each | € 2.097,10 | ||
| 711-1-RECERT | Pelcotec CDMS-XY-1C-ISO |
Each | € 488,90 |
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #712-01-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 712-01 | Pelcotec CDMS-XY-1C-ISO, Unmounted |
Each | € 2.953,70 | ||
| 712-01A | Pelcotec CDMS-0.1C-ISO,µmount A |
Each | € 2.983,20 | ||
| 712-01AFM | Pelcotec CDMS-0.1C-ISO, 12mm AFM Disc |
Each | € 2.983,20 | ||
| 712-01B | Pelcotec CDMS-0.1C-ISO,µmount B |
Each | € 2.983,20 | ||
| 712-01C | Pelcotec CDMS-0.1C-ISO,µmount C |
Each | € 2.983,20 | ||
| 712-01D | Pelcotec CDMS-0.1C-ISO,µmount D |
Each | € 2.983,20 | ||
| 712-01E | Pelcotec CDMS-0.1C-ISO,µmount E |
Each | € 2.983,20 | ||
| 712-01F | Pelcotec CDMS-0.1C-ISO,µmount F |
Each | € 2.983,20 | ||
| 712-01G | Pelcotec CDMS-0.1C-ISO,µmount G |
Each | p.o.r. | ||
| 712-01K | Pelcotec CDMS-0.1C-ISO,µmount K |
Each | € 2.983,20 | ||
| 712-01L | Pelcotec CDMS-0.1C-ISO,µmount L |
Each | € 2.983,20 | ||
| 712-01M | Pelcotec CDMS-0.1C-ISO,µmountµm |
Each | € 2.983,20 | ||
| 712-01O | Pelcotec CDMS-0.1C-ISO,µmount O |
Each | € 2.983,20 | ||
| 712-01P | Pelcotec CDMS-0.1C-ISO,µmount P |
Each | € 2.983,20 | ||
| 712-01Q | Pelcotec CDMS-0.1C-ISO,µmount Q |
Each | € 2.983,20 | ||
| 712-01R | Pelcotec CDMS-0.1C-ISO,µmount R |
Each | € 2.983,20 | ||
| 712-01S | Pelcotec CDMS-0.1C-ISO,µmount S |
Each | € 2.983,20 | ||
| 712-01-RECERT | Pelcotec CDMS-0.1C-ISO |
Each | € 672,30 |
