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Critical Dimension (CD)

Products

Critical Dimension (CD)

Critical Dimension (CD)
Calibration Test Specimens

for SEM, FIB, and AFM

Version with a 10-5-2-1-0.5um structure

This CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch.

Each pattern has five bars and spaces of equal pitch:10.0um, 5.0µm, 2.0µm, 1.0µm and 0.5µm. The central line area may be used for AFM measurements.

The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface.

Two types are offered:

  • non-certified
  • certified by PTB (Physikalische Technische Bundesanstalt - German counter part of NIST) and individually numbered.

Based on the measurement of 9 different standards, the accuracy and uniformity are:

Pattern Size10µm5µm2µm1µm0.5µm
Accuracy0.20%0.22%0.35%0.56%0.78%
Uniformity0.27%0.34%0.53%0.80%1.2%
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Product
CD Structure 10-5-2-1-0.5 m, non-certified
Critical Dimension (CD) Calibration Test Specimens
no. 618-5 to 618-5R

Description

for SEM, FIB, and AFM

“Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m.

The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm.
There is no coating on the Si surface.

Two types are offered:

  • non-certified
  • certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST)

and individually numbered.

Based on the measurement of 9 different standards, the accuracy and uniformity are:

Pattern Size 10 m 5 m 2 m 1 m 0.5 m
Accuracy 0.20% 0.22% 0.35% 0.56% 0.78%
Uniformity 0.27% 0.34% 0.53% 0.80% 1.2%
SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
618-5

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, unmounted

 Each € 142,70
✓
618-5A

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount A

 Each € 159,00
✓
618-5B

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount B

 Each € 159,00
✓
618-5C

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount C

 Each € 159,00
✓
618-5D

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount D

 Each € 159,00
✓
618-5E

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount E

 Each € 159,00
✓
618-5F

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount F

 Each € 159,00
✓
618-5G

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount G, You Supply Mount

 Each p.o.r.
618-5K

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount K

 Each € 159,00
✓
618-5L

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount L

 Each € 159,00
✓
618-5M

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount M

 Each € 159,00
✓
618-5O

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount O

 Each € 159,00
✓
618-5P

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount P

 Each € 159,00
✓
618-5Q

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount Q

 Each € 159,00
✓
618-5R

CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount R

 Each € 159,00
✓
Brand:

Product
CD Structure 10-5-2-1-0.5 m, certified
Critical Dimension (CD) Calibration Test Specimens
no. 618-7 to 618-7R

Description

for SEM, FIB, and AFM

“Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m.

The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm.
There is no coating on the Si surface.

Two types are offered:

  • non-certified
  • certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST)

and individually numbered.

Based on the measurement of 9 different standards, the accuracy and uniformity are:

Pattern Size 10 m 5 m 2 m 1 m 0.5 m
Accuracy 0.20% 0.22% 0.35% 0.56% 0.78%
Uniformity 0.27% 0.34% 0.53% 0.80% 1.2%
SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
618-7

CD Structure 10-5-2-1-0.5 m Specimen, unmounted

 Each € 2.007,40
✓
618-7A

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount A

 Each € 1.826,00
✓
618-7B

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount B

 Each € 1.826,00
✓
618-7C

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount C

 Each € 1.826,00
✓
618-7D

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount D

 Each € 1.826,00
✓
618-7E

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount E

 Each € 1.826,00
✓
618-7F

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount F

 Each € 1.826,00
✓
618-7G

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount G, You Supply Mount

 Each p.o.r.
618-7K

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount K

 Each € 1.826,00
✓
618-7L

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount L

 Each € 1.826,00
✓
618-7M

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount M

 Each € 1.826,00
✓
618-7O

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount O

 Each € 1.826,00
✓
618-7P

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount P

 Each € 1.826,00
✓
618-7Q

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount Q

 Each € 1.826,00
✓
618-7R

CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount R

 Each € 1.826,00
✓
Brand:

Product
CD Structure 500-200-100nm, non-certified
Critical Dimension (CD) Calibration Test Specimens
no. 618-4 to 618-4R

Description

(overview with location bars)
 Version with a 500-200-100nm structure

(structure)

This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch.

Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements.

The patterns are etched into Si with a depth of approx. 45-50nm. There is no coating on the Si surface.
On some CD calibration targets one of the 100nm lines can be missing. This is a normal occurrence and does not influence performance of the specimen.

 

Pattern Size 500nm 200nm 100nm
Accuracy 0.30% 0.55% 0.50%
Uniformity 0.24% 0.60% 1.20%

 

SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
618-4

CD Structure 500-200-100nm Specimen, non-certified, unmounted

 Each € 866,10
✓
618-4A

CD Structure 500-200-100nm Specimen, non-certified, Mount A

 Each € 868,90
✓
618-4B

CD Structure 500-200-100nm Specimen, non-certified, Mount B

 Each € 868,90
✓
618-4C

CD Structure 500-200-100nm Specimen, non-certified, Mount C

 Each € 868,90
✓
618-4D

CD Structure 500-200-100nm Specimen, non-certified, Mount D

 Each € 868,90
✓
618-4E

CD Structure 500-200-100nm Specimen, non-certified, Mount E

 Each € 868,90
✓
618-4F

CD Structure 500-200-100nm Specimen, non-certified, Mount F

 Each € 868,90
✓
618-4G

CD Structure 500-200-100nm Specimen, non-certified, Mount G, You Supply Mount

 Each p.o.r.
618-4K

CD Structure 500-200-100nm Specimen, non-certified, Mount K

 Each € 868,90
✓
618-4L

CD Structure 500-200-100nm Specimen, non-certified, Mount L

 Each € 868,90
✓
618-4M

CD Structure 500-200-100nm Specimen, non-certified, Mount M

 Each € 868,90
✓
618-4O

CD Structure 500-200-100nm Specimen, non-certified, Mount O

 Each € 868,90
✓
618-4P

CD Structure 500-200-100nm Specimen, non-certified, Mount P

 Each € 868,90
✓
618-4Q

CD Structure 500-200-100nm Specimen, non-certified, Mount Q

 Each € 868,90
✓
618-4R

CD Structure 500-200-100nm Specimen, non-certified, Mount R

 Each € 868,90
✓
Brand:

Contact

Van Loenen Instruments
Penningweg 69 E
1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

BTW/VAT nr. :NL804 608 180 B01
KvK nr. :28038099

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