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Home / Accessories for Microscopy / Nanotechnology / Calibration / AFM Calibration / AFM, STM, SPM Calibration

AFM, STM, SPM Calibration

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AFM, STM, SPM Calibration

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Product
Description
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Product

Block Test Gratings for Z-axis
Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
no. 629-10 to 629-30AFM

Description

Block Test Gratings for Z-axis

Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.

 

 

Structure: Si Wafer with SiO2 layer for grating
Pattern type: 1-Dimensional (in Z-axis direction)
Step heights: 20 1.5nm for TGZ-20
110 2nm for TGZ-100
520 3nm for TGZ-500
Period: 3 ±0.01 µm
Chip size: 5 x 5 x 0.5mm
Effective area: Central square of 3 x 3mm

Note: Values for step heights are nominal; actual step height is given with the product and could be 5%

Order

Art.Description Unit PriceQuantity
629-10

Calibration grating TGZ-20, Z=18.5nm, unmounted

Each € 326,00
✓
spinner
629-10AFM

Calibration grating TGZ-20, Z=18.5nm, mounted on 12mm AFM disc

Each € 342,30
✓
spinner
629-20

Calibration grating TGZ-100, Z=108.5nm, unmounted

Each € 326,00
✓
spinner
629-20AFM

Calibration grating TGZ-100, Z=108.5nm, mounted on 12mm AFM disc

Each € 342,30
✓
spinner
629-30

Calibration grating TGZ-500, Z=535.5nm, unmounted

Each € 326,00
✓
spinner
629-30AFM

Calibration grating TGZ-500, Z=535.5nm, mounted on 12mm AFM disc

Each € 342,30
✓
spinner
Brand: Ted Pella

Product
Description
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Product

Triangular Test Grating for X- or Y-axis
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity
no. 629-40 and 629-40AFM

Description

Triangular Test Grating for X- or Y-axis

The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.
Nominal values for height and pitch are given below. Actual values come with the test grating.

 

Structure: Si wafer with grating in top surface
Pattern type: 1-D array of triangular steps with
precise linear and angular dimensions
Edge angle: approximately 70 degrees
Edge Radius: ?10nm
Pattern Height: 1.8 m – non-calibrated, for information only
Pitch: 3 ±0.01 µm
Chip size: 5 x 5 x 0.5mm
Effective area: Central square of 3 x 3mm
Order

Art.Description Unit PriceQuantity
629-40

Test grating TGT-1500, 3 m pitch, unmounted

Each € 306,40
✓
spinner
629-40AFM

Test grating TGT-1500, 3 m pitch, mounted on 12mm AFM disc

Each € 326,00
✓
spinner
Brand: Ted Pella

Product
Description
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Product

Test Grating for Tip Sharpness
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip
no. 629-50 and 629-50AFM

Description

Test Grating for Tip Sharpness
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.

Structure: Si wafer with grating in top surface
Pattern type: Array of sharp tips
Tip angle: About 50 degrees
Tip height: 0.3 – 0.7 µm
Period: 3 ±0.01 µm
Diagonal period: 2.12 µm
Chip size: 5 x 5 x 0.5mm
Effective area: Central square of 2 x 2mm
Order

Art.Description Unit PriceQuantity
629-50

Test grating TGTZ-400, 300-700nm tips, unmounted

Each € 611,10
✓
spinner
629-50AFM

Test grating TGTZ-400, 300-700nm tips, mounted on 12mm AFM disc

Each € 626,40
✓
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Brand: Ted Pella

Product
Description
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Product

Test Grating for Lateral Calibration
The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners
no. 629-60 and 629-60AFM

Description

Test Grating for Lateral Calibration

The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.

Structure: Si wafer with grating in top surface

Pattern type: Chessboard like array of square
pillars with sharp undercut edges
Height: 0.3 – 0.6 µm
Top square size 1.2 x 1.2 µm
Edge radius: ­≤10nm
Period: 3 ±0.05 µm
Chip size: 5 x 5 x 0.5mm
Effective area: Central square of 3 x 3mm

Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).

Order

Art.Description Unit PriceQuantity
629-60

Test grating TG3D-3000/600, pillars, unmounted

Each € 449,60
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629-60AFM

Test grating TG3D-3000/600, pillars, mounted on 12mm AFM disc

Each € 472,30
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Brand: Ted Pella

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Description
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Test Grating for X-, Y- and Z-direction
The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction
no. 629-70 and 629-70AFM

Description

Test Grating for X-, Y- and Z-direction

The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.

Structure: Si wafer with SiO2 layer for grating
Pattern type: 3-Dimensional array of small squares
Height: 20 ±1.5nm
Square size: 1.5 ±0.15 µm
Period: 3 ±0.05 µm
Chip size: 5 x 5 x 0.5mm
Effective area: Central square of 3 x 3mm

Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).

Order

Art.Description Unit PriceQuantity
629-70

Test grating TG3D-3000/20, squares, unmounted

Each € 611,10
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629-70AFM

Test grating TG3D-3000/20, squares, mounted on 12mm AFM disc

Each € 626,40
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Brand: Ted Pella

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SiC-STEP Calibration Samples
6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an AFM scanner's vertical movements in several nanometers interval.
no. 629-85 to 629-90AAFM

Description

SiC-STEP Calibration Samples

6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an AFM scanner’s vertical movements in several nanometers interval.
The simplicity of calibration of the calibration process is provided by the nearly uniform distribution of half-monolayer high steps (either 0.75 or 1.5nm) on the sample surface demonstrating both chemical and mechanical stability.

The step height corresponds to the half of the lattice constant of the 6H-SiC crystal in the (0001) direction.

 

Specifications: SiC / 0.75 SiC / 1.5
Structure: SiC with Steps
Single Step Height: 0.75nm 1.5nm
Average Inter Step Distance: 0.15-0.4 µm 0.2-0.5 µm
Misorientation of Surface: ~0.2 ~0.3
Average Roughness of Area Between Steps (terraces): 0.09nm
Chip Size: 5 x 5 x 0.3mm

 

SiC/0.75 SiC/1.5
Order

Art.Description Unit PriceQuantity
629-85

SiC-STEP Calibration Sample with 0.75nm Step Height, unmounted

Each € 403,40
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629-85AFM

SiC-STEP Calibration Sample with 0.75nm Step Height, mounted on 12mm AFM disc

Each € 426,60
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629-90

SiC-STEP Calibration Sample with 1.50nm Step Height, unmounted

Each € 403,40
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629-90AFM

SiC-STEP Calibration Sample with 1.50nm Step Height, mounted on 12mm AFM disc

Each € 426,60
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Brand: Ted Pella

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Calibration grating – TGX
The TGX series silicon calibration grating is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm
no. AGF7026

Description

Grating type TGX

The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon.
The typical radius of the edges is less than 5 nm.

Application

The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:

  • detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
  • determination of the tip aspect ratio

For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Cat. no. Grating type Step height
µm*
Pitch
µm
Accuracy
µm
Edge radii
mm
Active area
mm
Chip dims. mm
AGF7026 TGX01 1 3.0 0.1 <5 1 x 1 5 x 5 x 0.3

* The step height value is given for information only, not for vertical calibration purposes

Order

Art.Description Unit PriceQuantity
AGF7026

Grating Type TGX01 3 Micron Pitch

Each p.o.r.
Brand: Agar

Product
Description
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Product

Calibration gratings – TGXYZ series
Calibration gratings arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer.
no. AGF7021 to AGF7023

Description

Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500μm by 500μm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5μm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10μm.

The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.

The TGXYZ series of Calibration Gratings are supplied mounted on a round 12mm dia metal plate. They are also available unmounted if required.

Active area: 1 x 1mm
Chip dimensions: 5 x 5 x 0.3mm

Cat. no. Part number Step height* Height accuracy Pitch Pitch accuracy
AGF7021 TGXYZ01 20nm 2% 5 and 10μm 0.1μm
AGF7022 TGXYZ02 100nm 3% 5 and 10μm 0.1μm
AGF7023 TGXYZ03 500nm 3% 5 and 10μm 0.1μm

* The step height value is given for information only, not for vertical calibration purposes

Order

Art.Description Unit PriceQuantity
AGF7021

Grating TGXYZ01 Step Height 20nm

Each € 366,80
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AGF7022

Grating TGXYZ02 Step Height 100nm

Each € 366,80
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AGF7023

Grating TGXYZ03 Step Height 500nm

Each € 366,80
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Brand: Agar

Contact

Van Loenen Instruments
Penningweg 69 E
1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

BTW/VAT nr. :NL804 608 180 B01
KvK nr. :28038099

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