Products
CDMS
Pelcotec™ CDMS Critical Dimension Magnification Standards
Easy to use and very useful for quick and precise
SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration.
Available as NIST Traceable or as Certified against NIST Standard
Unique, economically priced, yet fully featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available with two features size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:
- Pelcotec™ CDMS-1T; fully traceable with features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications
- Pelcotec™ CDMS -0.1T; fully traceable with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications
- Pelcotec™ CDMS-1C; individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
- Pelcotec™ CDMS-0.1C; individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10 – 200,000x; for all SEM and most FESEM applications.
Feature sizes for the Pelcotec™ CDMS-1T and -1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.
Feature sizes for the Pelcotec™ CDMS-0.1T & 0.1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec™ CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features sizes from 2µm to 100nm.
The Cr and Au/Cr on Si provides excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards.
Since the silicon substrate, the chromium and the chromium/gold features are all conductive there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 675µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS calibration standard has a unique identification number.
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS is mounted on a 12mm AFM disc, for LM applications it is mounted on a 25 x 75mm glass slide.
The specimen may also be prepared on a custom mount of your choice.
Store the Pelcotec™ CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
| Pelcotec™ CDMS-1 | Pelcotec™ CDMS-0.1 | |
|---|---|---|
| Substrate: Silicon | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Feature size: 2mm to 1µm | ✓ | ✓ |
| Feature size: 500, 250 and 100nm | — | ✓ |
| Feature material: 50nm Cr (2mm – 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100 nm) | — | ✓ |
| Traceable at the wafer level to NIST | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard | C versions | C versions |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
NIST traceable with features from 2mm to 1µm for magnification 10x – 20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 682-1 | Pelcotec CDMS-1T, 2mm – 1µm, traceable, unmounted |
Each | € 110,90 | ||
| 682-1A | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount A |
Each | € 110,20 | ||
| 682-1AFM | Pelcotec CDMS-1T, 2mm – 1µm, traceable, 12mm AFM Disc |
Each | € 110,20 | ||
| 682-1B | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount B |
Each | € 110,20 | ||
| 682-1C | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount C |
Each | € 110,20 | ||
| 682-1D | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount D |
Each | € 110,20 | ||
| 682-1E | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount E |
Each | € 110,20 | ||
| 682-1F | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount F |
Each | € 110,20 | ||
| 682-1G | Pelcotec CDMS-1T, 2mm – 1µm, traceable, you supplyµmount |
Each | p.o.r. | ||
| 682-1K | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount K |
Each | € 110,20 | ||
| 682-1L | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount L |
Each | € 110,20 | ||
| 682-1M | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmountµm |
Each | € 110,20 | ||
| 682-1O | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount O |
Each | € 110,20 | ||
| 682-1P | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount P |
Each | € 110,20 | ||
| 682-1Q | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount Q |
Each | € 110,20 | ||
| 682-1R | Pelcotec CDMS-1T, 2mm – 1µm, traceable,µmount R |
Each | € 110,20 | ||
| 682-1S | Pelcotec CDMS-1T, 2mm – 1µm, traceable, 25x75mm glass slide |
Each | € 110,20 |
NIST traceable with features from 2mm to 100nm for magnification 10x – 200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 683-01 | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable, unmounted |
Each | € 478,80 | ||
| 683-01A | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount A |
Each | € 546,10 | ||
| 683-01AFM | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable, 12mm AFM Disc |
Each | € 546,10 | ||
| 683-01B | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount B |
Each | € 546,10 | ||
| 683-01C | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount C |
Each | € 546,10 | ||
| 683-01D | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount D |
Each | € 546,10 | ||
| 683-01E | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount E |
Each | € 546,10 | ||
| 683-01F | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount F |
Each | € 546,10 | ||
| 683-01G | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable, you supplyµmount |
Each | p.o.r. | ||
| 683-01K | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount K |
Each | € 546,10 | ||
| 683-01L | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount L |
Each | € 546,10 | ||
| 683-01M | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmountµm |
Each | € 546,10 | ||
| 683-01O | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount O |
Each | € 546,10 | ||
| 683-01P | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount P |
Each | € 546,10 | ||
| 683-01Q | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount Q |
Each | € 546,10 | ||
| 683-01R | Pelcotec CDMS-0.1T, 2mm – 100nm, traceable,µmount R |
Each | € 546,10 | ||
| 683-01S | Pelcotec CDMS-1T, 2mm – 100nm, traceable, 25x75mm glass slide |
Each | € 546,10 |
Certified against NIST standard with features from 2mm to 1µm for magnification 10x – 20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 686-1 | Pelcotec CDMS-1C, 2mm – 1µm, certified, unmounted |
Each | € 757,50 | ||
| 686-1A | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount A |
Each | € 794,90 | ||
| 686-1AFM | Pelcotec CDMS-1C, 2mm – 1µm, certified, 12mm AFM Disc |
Each | € 794,90 | ||
| 686-1B | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount B |
Each | € 794,90 | ||
| 686-1C | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount C |
Each | € 794,90 | ||
| 686-1D | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount D |
Each | € 794,90 | ||
| 686-1E | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount E |
Each | € 794,90 | ||
| 686-1F | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount F |
Each | € 794,90 | ||
| 686-1G | Pelcotec CDMS-1C, 2mm – 1µm, certified, you supplyµmount |
Each | p.o.r. | ||
| 686-1K | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount K |
Each | € 794,90 | ||
| 686-1L | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount L |
Each | € 794,90 | ||
| 686-1M | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmountµm |
Each | € 794,90 | ||
| 686-1O | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount O |
Each | € 794,90 | ||
| 686-1P | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount P |
Each | € 794,90 | ||
| 686-1Q | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount Q |
Each | € 794,90 | ||
| 686-1R | Pelcotec CDMS-1C, 2mm – 1µm, certified,µmount R |
Each | € 794,90 | ||
| 686-1S | Pelcotec CDMS-1C, 2mm – 1µm, certified, 25x75mm glass slide |
Each | € 794,90 |
Certified against NIST standard with features from 2mm to 100nm for magnification 10x – 200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 687-01 | Pelcotec CDMS-0.1C, 2mm – 100nm, certified, unmounted |
Each | € 1.036,60 | ||
| 687-01A | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount A |
Each | € 1.150,30 | ||
| 687-01AFM | Pelcotec CDMS-0.1C, 2mm – 100nm, certified, 12mm AFM Disc |
Each | € 1.150,30 | ||
| 687-01B | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount B |
Each | € 1.150,30 | ||
| 687-01C | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount C |
Each | € 1.150,30 | ||
| 687-01D | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount D |
Each | € 1.150,30 | ||
| 687-01E | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount E |
Each | € 1.150,30 | ||
| 687-01F | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount F |
Each | € 1.150,30 | ||
| 687-01G | Pelcotec CDMS-0.1C, 2mm – 100nm, certified, you supplyµmount |
Each | p.o.r. | ||
| 687-01K | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount K |
Each | € 1.150,30 | ||
| 687-01L | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount L |
Each | € 1.150,30 | ||
| 687-01M | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmountµm |
Each | € 1.150,30 | ||
| 687-01O | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount O |
Each | € 1.150,30 | ||
| 687-01P | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount P |
Each | € 1.150,30 | ||
| 687-01Q | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount Q |
Each | € 1.150,30 | ||
| 687-01R | Pelcotec CDMS-0.1C, 2mm – 100nm, certified,µmount R |
Each | € 1.150,30 | ||
| 687-01S | Pelcotec CDMS-0.1C, 2mm – 100nm, certified, 25x75mm glass slide |
Each | € 1.150,30 |
