Products
Line/Grid Standards
Pelcotec LMS-20G Magnification Calibration Standard
Large area, resolution 0.01mm
The Pelcotec LMS-20G calibration standard for transmitted light microscopy has been designed for precise magnification calibration and microscope stage calibration.
The 20 x10mm pattern is fabricated with Cr lines on clear soda lime glass.
The glass is fitted in a black metal slide.
Useful in the 5x to 1000x magnification range.
Specifications are:
- Total calibration area is 20 x 10mm with crossed lines and 0.01mm divisions
- 75nm Cr lines on clear soda lime g
- Cross hairs showed on every 0.1mm with larger cross hairs at 0.5 and 1mm over the complete area
- Glass thickness 550 m 50 m
- Glass mounted in black metal slide, 76.2×25.4×1.6mm
- Individual serial number on each Pelcotec LMS-20G calibration standard
- NIST Traceable version is Pelcotec LMS-20GT (batch level certificate provided)
- Individually certified version is Pelcotec LMS-20GC (individual certificate included)
 |
Download Technical Note |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 688-2 | Pelcotec™ LMS-20GT, Magnification Calibration standard, Transmitted Light, Traceable, in 3″x 1″ metal slide |
Each | € 397,30 | ||
| 688-22 | Pelcotec™ LMS-20GC, Magnification Calibration standard, Transmitted Light, Certified, in 3″x 1″ metal slide |
Each | € 1.002,50 |
Pelcotec LMS-20 Low Magnification Calibration Standard
The Pelcotec LMS-20 Calibration Standard has been specifically designed for precise low magnification calibration and specimen stage calibration.
Useful for large area particle analysis, GSR analysis, low magnification SEM applications, and LM applications with reflected light.
Useful in the 5x to 1000x magnification range.
Specifications are:
- Total calibration area is 20 x 10mm with crossed lines and 0.01mm divisions
- 75nm Cr lines on ultra-flat silicon substrate
- Cross hairs showed at every 0.1mm with larger cross hairs at 0.5 and 1mm over the complete area
- Serial number etched on each Pelcotec LMS-20 calibration standard
- NIST traceable version is Pelcotec LMS-20T (batch level certificate provided)
- Individually fully certified version is Pelcotec LMS-20C (individual certificate included)
- Si die size is 22 x 11mm with a thickness of 675 m +/- 10 m, <100> orientation
- Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
- Available unmounted or mounted on larger SEM specimen mounts
To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the SEM pin mount, the #16179 PELCO SEM Sample Stub Vacuum Desiccator would be ideal.
Also available for transmitted light microscopy as LMS-20G
Sample Certificate of Traceability
 |
688-1 LMS-20T Sample Certificate of Traceability |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 688-1 | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Unmounted |
Each | € 226,50 | ||
| 688-1G | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mount G, you supply mount |
Each | p.o.r. | ||
| 688-1L | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mount L |
Each | € 241,20 | ||
| 688-1O | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mount O |
Each | € 241,20 | ||
| 688-1Q | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mount Q |
Each | € 241,20 | ||
| 688-1R | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mount R |
Each | € 241,20 | ||
| 688-1S | Pelcotec™ LMS-20T, Low-Mag Calibration Standard, Traceable, Mounted on 25x75mm slide |
Each | € 241,20 |
Pelcotec LMS-20 Low Magnification Calibration Standard
The Pelcotec LMS-20 Calibration Standard has been specifically designed for precise low magnification calibration and specimen stage calibration.
Useful for large area particle analysis, GSR analysis, low magnification SEM applications, and LM applications with reflected light.
Useful in the 5x to 1000x magnification range.
Specifications are:
- Total calibration area is 20 x 10mm with crossed lines and 0.01mm divisions
- 75nm Cr lines on ultra-flat silicon substrate
- Cross hairs showed at every 0.1mm with larger cross hairs at 0.5 and 1mm over the complete area
- Serial number etched on each Pelcotec LMS-20 calibration standard
- NIST traceable version is Pelcotec LMS-20T (batch level certificate provided)
- Individually fully certified version is Pelcotec LMS-20C (individual certificate included)
- Si die size is 22 x 11mm with a thickness of 675 m +/- 10 m, <100> orientation
- Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
- Available unmounted or mounted on larger SEM specimen mounts
To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the SEM pin mount, the #16179 PELCO SEM Sample Stub Vacuum Desiccator would be ideal.
Also available for transmitted light microscopy as LMS-20G
Sample Certificate of Traceability
|
688-11 LMS-20C Sample Certificate |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 688-11 | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified Unmounted |
Each | € 829,90 | ||
| 688-11G | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mount G, you supply mount |
Each | p.o.r. | ||
| 688-11L | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mount L |
Each | € 856,60 | ||
| 688-11O | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mount O |
Each | € 856,60 | ||
| 688-11Q | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mount Q |
Each | € 856,60 | ||
| 688-11R | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mount R |
Each | € 856,60 | ||
| 688-11S | Pelcotec™ LMS-20C, Low-Mag Calibration Standard, Certified, Mounted on 25x75mm slide |
Each | € 856,60 |
Pelcotec G-1 Silicon Calibration Specimen – 1 m Pitch
Includes 1 m, 10 m and 100 m pitch
The Pelcotec G-1 calibration specimen with a 1 m pitch grid is very useful for magnification calibration or image distortion check in the 100x to 10,000x magnification range.
Can be used for SEM, Auger, Sims, FIB, and LM (reflected light).
Specimen may also be mounted directly on the Pelcotec G-1 which will give an accurate internal calibration in the image.
Particularly useful when working with powders.
Possible alternative for the SIRA calbration specimen (0.462 m pitch) which is no longer available.
The Pelcotec G-1 has the following specifications:
- Total calibration area is 3x3mm with a 1 m pitch grid
- Lines at 10um and 100um are thicker for easy orientation
- Includes 1 m, 10 m and 100 m pitch
- 300nm +/- 30nm deep line etched in ultraflat Si
- Line width is 200nm at 1 m, 300nm at 10 m and 400nm at 100 m pitch lines
- Precision is 1 m +/- 0.025 m with a perpendicularity better than 0.01
- Serial number etched on each Pelcotec G-1 calibration standard
- NIST traceable version is Pelcotec G-1T
- Individually fully certified version is Pelcotec G-1C
- Si die size is 4x4mm with a thickness of 525 m +/-20 m, <100> orientation
- Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
- Available unmounted or mounted on SEM specimen mounts
To avoid contamination of test and calibration samples, we recommend storing these under vacuum.
 |
 |
 |
| SEM Image Shows 1 m Pitch | 10 m Pitch Lines | 1 m Pitch Lines |
|
Download 633-1 Sample Certificate of Traceability |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 633-1 | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Unmounted |
Each | € 136,40 | ||
| 633-1A | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount A |
Each | € 152,40 | ||
| 633-1B | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount B |
Each | € 152,40 | ||
| 633-1C | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount C |
Each | € 152,40 | ||
| 633-1D | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount D |
Each | € 152,40 | ||
| 633-1E | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount E |
Each | € 152,40 | ||
| 633-1F | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount F |
Each | € 152,40 | ||
| 633-1G | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount G, you supply mount |
Each | p.o.r. | ||
| 633-1K | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount K |
Each | € 152,40 | ||
| 633-1L | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount L |
Each | € 152,40 | ||
| 633-1M | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount M |
Each | € 152,40 | ||
| 633-1O | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount O |
Each | € 152,40 | ||
| 633-1P | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount P |
Each | € 152,40 | ||
| 633-1Q | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount Q |
Each | € 152,40 | ||
| 633-1R | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mount R |
Each | € 152,40 | ||
| 633-1S | Pelcotec™ G-1T, 1 m Grid Calibration Standard, Traceable, Mounted on 25x75mm slide |
Each | € 152,40 |
Pelcotec G-1 Silicon Calibration Specimen – 1 µm Pitch
Includes 1 m, 10 µm and 100 µm pitch
The Pelcotec G-1 calibration specimen with a 1 m pitch grid is very useful for magnification calibration or image distortion check in the 100x to 10,000x magnification range.
Can be used for SEM, Auger, Sims, FIB, and LM (reflected light).
Specimen may also be mounted directly on the Pelcotec G-1 which will give an accurate internal calibration in the image.
Particularly useful when working with powders.
Possible alternative for the SIRA calbration specimen (0.462 µm pitch) which is no longer available.
The Pelcotec G-1 has the following specifications:
- Total calibration area is 3x3mm with a 1 µm pitch grid
- Lines at 10um and 100um are thicker for easy orientation
- Includes 1 µm, 10 µm and 100 µm pitch
- 300nm +/- 30nm deep line etched in ultraflat Si
- Line width is 200nm at 1 m, 300nm at 10 m and 400nm at 100 m pitch lines
- Precision is 1 m +/- 0.025 m with a perpendicularity better than 0.01
- Serial number etched on each Pelcotec G-1 calibration standard
- NIST traceable version is Pelcotec G-1T
- Individually fully certified version is Pelcotec G-1C
- Si die size is 4x4mm with a thickness of 525 m +/-20 m, <100> orientation
- Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
- Available unmounted or mounted on SEM specimen mounts
To avoid contamination of test and calibration samples, we recommend storing these under vacuum.
|
|
|
| SEM Image Shows 1 m Pitch | 10 m Pitch Lines | 1 m Pitch Lines |
|
Download 633-11 Sample Certificate of Calibration |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 633-11 | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Unmounted |
Each | € 744,00 | ||
| 633-11A | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount A |
Each | € 739,10 | ||
| 633-11B | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount B |
Each | € 739,10 | ||
| 633-11C | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount C |
Each | € 739,10 | ||
| 633-11D | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount D |
Each | € 739,10 | ||
| 633-11E | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount E |
Each | € 739,10 | ||
| 633-11F | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount F |
Each | € 739,10 | ||
| 633-11G | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount G, you supply mount |
Each | p.o.r. | ||
| 633-11K | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount K |
Each | € 739,10 | ||
| 633-11L | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount L |
Each | € 739,10 | ||
| 633-11M | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount M |
Each | € 739,10 | ||
| 633-11O | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount O |
Each | € 739,10 | ||
| 633-11P | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount P |
Each | € 739,10 | ||
| 633-11Q | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount Q |
Each | € 739,10 | ||
| 633-11R | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mount R |
Each | € 739,10 | ||
| 633-11S | Pelcotec™ G-1C, 1 m Grid Calibration Standard, Certified, Mounted on 25x75mm slide |
Each | € 739,10 |
Planotec Silicon Calibration Specimen – 10 m Pitch
Useful for magnification calibration or image distortion check in SEM and LM.
Single crystal silicon, 5mm x 5mm.
The squares repeat every 10 m (0.01mm).
The dividing lines are about 1.9 m wide, formed by electron beam lithography.
A broader marking line is written every 500 m (0.5mm) which is useful for light microscopy.
Lines are etched, and approximately 300nm deep.
Available unmounted or mounted on SEM specimen mounts.
A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.
Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.
- Thickness: 675 m
- Si crystal orientation: <100>
- Wafer type: P-type/boron doped
- Resistance: 1-30 Ohm/cm
To avoid contamination of test and calibration samples, we recommend storing these under vacuum.
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 615 | Planotec Silicon Test Specimen, Unmounted |
Each | € 110,10 | ||
| 615-A | Planotec Silicon Test Specimen, Mount A |
Each | € 136,90 | ||
| 615-B | Planotec Silicon Test Specimen, Mount B |
Each | € 136,90 | ||
| 615-C | Planotec Silicon Test Specimen, Mount C |
Each | € 136,90 | ||
| 615-D | Planotec Silicon Test Specimen, Mount D |
Each | € 136,90 | ||
| 615-E | Planotec Silicon Test Specimen, Mount E |
Each | € 136,90 | ||
| 615-F | Planotec Silicon Test Specimen, Mount F |
Each | € 136,90 | ||
| 615-G | Planotec Silicon Test Specimen, Mount G, you supply mount |
Each | p.o.r. | ||
| 615-K | Planotec Silicon Test Specimen, Mount K |
Each | € 136,90 | ||
| 615-L | Planotec Silicon Test Specimen, Mount L |
Each | € 136,90 | ||
| 615-M | Planotec Silicon Test Specimen, Mount M |
Each | € 136,90 | ||
| 615-O | Planotec Silicon Test Specimen, Mount O |
Each | € 136,90 | ||
| 615-P | Planotec Silicon Test Specimen, Mount P |
Each | € 136,90 | ||
| 615-Q | Planotec Silicon Test Specimen, Mount Q |
Each | € 136,90 | ||
| 615-R | Planotec SiliconTest Specimen, Mount R |
Each | € 138,30 | ||
| 615-5 | Planotec Test Specimen for incident light microscopy, Mounted on a blackened glass slide |
Each | € 564,60 |
Planotec Silicon Calibration Specimen – 10 m Pitch
Useful for magnification calibration or image distortion check in SEM and LM.
Single crystal silicon, 5mm x 5mm.
The squares repeat every 10 m (0.01mm).
The dividing lines are about 1.9 m wide, formed by electron beam lithography.
A broader marking line is written every 500 m (0.5mm) which is useful for light microscopy.
Lines are etched, and approximately 300nm deep.
Available unmounted or mounted on SEM specimen mounts.
A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.
Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.
- Thickness: 675 m
- Si crystal orientation: <100>
- Wafer type: P-type/boron doped
- Resistance: 1-30 Ohm/cm
To avoid contamination of test and calibration samples, we recommend storing these under vacuum.
 |
Download Sample Certification for Planotec Test Specimen |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 660-615-A | Planotec Silicon Test Specimen, Certified, Mount A |
Each | € 1.086,60 | ||
| 660-615-B | Planotec SiliconTest Specimen, Certified, Mount B |
Each | € 1.024,80 | ||
| 660-615-C | Planotec Silicon Test Specimen, Certified, Mount C |
Each | € 1.024,80 | ||
| 660-615-D | Planotec Silicon Test Specimen, Certified, Mount D |
Each | € 2.212,30 | ||
| 660-615-E | Planotec Silicon Test Specimen, Certified, Mount E |
Each | € 1.024,80 | ||
| 660-615-F | Planotec Silicon Test Specimen, Certified, Mount F |
Each | € 952,30 | ||
| 660-615-G | Planotec Silicon Test Specimen, Certified, Mount G, you supply mount |
Each | € 1.155,70 | ||
| 660-615-K | Planotec Silicon Test Specimen, Certified, Mount K |
Each | € 1.004,30 | ||
| 660-615-L | Planotec Silicon Test Specimen, Certified, Mount L |
Each | € 1.684,50 | ||
| 660-615-M | Planotec Silicon Test Specimen, Certified, Mount M |
Each | € 1.031,00 | ||
| 660-615-O | Planotec Silicon Test Specimen, Certified, Mount O |
Each | € 1.031,00 | ||
| 660-615-P | Planotec Silicon Test Specimen, Certified, Mount P |
Each | € 1.031,00 | ||
| 660-615-Q | Planotec Silicon Test Specimen, Certified, Mount Q |
Each | € 986,60 | ||
| 660-615-R | Planotec Silicon Test Specimen, Certified, Mount R |
Each | € 1.031,00 | ||
| 660-615-5 | Planotec Test Specimen for incident light microscopy, Certified, Mounted on a blackened glass slide |
Each | € 1.105,10 |
Low Magnification Calibration Ruler
100 markings, divisions 0.01mm on disc
Calibration ruler on 1/8″ (3.2mm) nickel-plated copper disc. 1mm long scale with 100 markings, with 0.01mm divisions with an accuracy of +/- 0.0005mm or better.
Available unmounted, or mounted on SEM mounts.
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 630 | Lo-mag Calibration Disc, Unmounted |
Each | € 139,50 | ||
| 630-A | Lo-mag Calibration Disc, Mount A |
Each | € 152,40 | ||
| 630-B | Lo-mag Calibration Disc, Mount B |
Each | € 152,40 | ||
| 630-C | Lo-mag Calibration Disc, Mount C |
Each | € 152,40 | ||
| 630-D | Lo-mag Calibration Disc, Mount D |
Each | € 152,40 | ||
| 630-E | Lo-mag Calibration Disc, Mount E |
Each | € 152,40 | ||
| 630-F | Lo-mag Calibration Disc, Mount F |
Each | € 152,40 | ||
| 630-G | Lo-mag Calibration Disc, Mount G, You Supply Mount |
Each | p.o.r. | ||
| 630-K | Lo-mag Calibration Disc, Mount K |
Each | € 152,40 | ||
| 630-L | Lo-mag Calibration Disc, Mount L |
Each | € 152,40 | ||
| 630-M | Lo-mag Calibration Disc, Mount M |
Each | € 152,40 | ||
| 630-O | Lo-mag Calibration Disc, Mount O |
Each | € 152,40 | ||
| 630-P | Lo-mag Calibration Disc, Mount P |
Each | € 152,40 | ||
| 630-Q | Lo-mag Calibration Disc, Mount Q |
Each | € 152,40 | ||
| 630-R | Lo-mag Calibration Disc, Mount R |
Each | € 152,40 |
500nm SEM Cross Line Grating Replica
500nm cross line grating carbon replica (waffle pattern) with Au/Pd shadowing.
Replica is mounted on a 400 mesh copper TEM grid with a diameter of 3mm.
This cross line replica has well-defined trench type grooves, which makes it easy to determine the 500nm pitch or the 2,000 lines per millimeter.
Available as unmounted standard or mounted on a SEM mount.
See our #253 Magnification Calibration slide-rule for quick assistance in obtaining magnification based on space counts of this product.
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 674 | SEM Grating Replica, 500nm, Unmounted |
Each | € 72,60 | ||
| 674-A | SEM Grating Replica, 500nm, Mount A |
Each | € 81,40 | ||
| 674-B | SEM Grating Replica, 500nm, Mount B |
Each | € 81,40 | ||
| 674-C | SEM Grating Replica, 500nm, Mount C |
Each | € 81,40 | ||
| 674-D | SEM Grating Replica, 500nm, Mount D |
Each | € 81,40 | ||
| 674-E | SEM Grating Replica, 500nm, Mount E |
Each | € 81,40 | ||
| 674-F | SEM Grating Replica, 500nm, Mount F |
Each | € 81,40 | ||
| 674-G | SEM Grating Replica, 500nm, Mount G, You Supply Mount |
Each | p.o.r. | ||
| 674-K | SEM Grating Replica, 500nm, Mount K |
Each | € 81,40 | ||
| 674-L | SEM Grating Replica, 500nm, Mount L |
Each | € 81,40 | ||
| 674-M | SEM Grating Replica, 500nm, Mount M |
Each | € 81,40 | ||
| 674-O | SEM Grating Replica, 500nm, Mount O |
Each | € 81,40 | ||
| 674-P | SEM Grating Replica, 500nm, Mount P |
Each | € 81,40 | ||
| 674-Q | SEM Grating Replica, 500nm, Mount Q |
Each | € 81,40 | ||
| 674-R | SEM Grating Replica, 500nm, Mount R |
Each | € 81,40 |
Grating Replica, Waffle
(Crossed-Lines)
Carbon replica with Au/Pd shadowing with 2,160 lines per millimeter.
Replica is mounted on a 400 mesh copper TEM grid with a diameter of 3mm.
See our number 252 Magnification Calibration Slide-Rule for quick assistance in obtaining magnification based on space counts of this product.
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 604 | SEM Grating Replica, Unmounted |
Each | € 79,10 | ||
| 604-A | SEM Grating Replica, Mount A |
Each | € 87,30 | ||
| 604-B | SEM Grating Replica, Mount B |
Each | € 87,30 | ||
| 604-C | SEM Grating Replica, Mount C |
Each | € 87,30 | ||
| 604-D | SEM Grating Replica, Mount D |
Each | € 87,30 | ||
| 604-E | SEM Grating Replica, Mount E |
Each | € 87,30 | ||
| 604-F | SEM Grating Replica, Mount F |
Each | € 87,30 | ||
| 604-G | SEM Grating Replica, Mount G, you supply mount |
Each | p.o.r. | ||
| 604-K | SEM Grating Replica, Mount K |
Each | € 87,30 | ||
| 604-L | SEM Grating Replica, Mount L |
Each | € 87,30 | ||
| 604-M | SEM Grating Replica, Mount M |
Each | € 87,30 | ||
| 604-O | SEM Grating Replica, Mount O |
Each | € 87,30 | ||
| 604-P | SEM Grating Replica, Mount P |
Each | € 87,30 | ||
| 604-Q | SEM Grating Replica, Mount Q |
Each | € 87,30 | ||
| 604-R | SEM Grating Replica, Mount R |
Each | € 87,30 |
Fine Copper Mesh Grids in Folding Grids (unmounted)
For low magnification calibration of scanning electron microscopes.
The fine mesh is held within a 3mm 100 mesh folding grid.
Available with 1000 mesh (25.4 m pitch).
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 631-A | 1000 mesh in 3mm 100 mesh Folding Grid |
Each | € 74,40 |
