Products
Very High Resolution Calibration
144nm Very High Resolution 2D Calibration Standard
for AFM, STM, Auger, FIB, and SEM
| Period: | 144nm pitch, two-dimensional array. Accurate to ±1nm. Refer to calibration certificate for actual pitch. |
| Surface: | Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. |
| AFM: | Use in contact, intermittent contact (TappingMode™ ) and other modes with image sizes from 250nm to 10µm. Available unmounted or mounted on 12mm steel disks. |
| SEM: | This specimen works well at all accelerating voltages. Normally supplied unmounted. Can be mounted on a stub of your choice |
| Model 2D: | This Calibration Reference specimen comes with a non-traceable, manufacturer’s certificate. This states the average period, based on batch measurements. See Sample Certificate |
| Model 2DUTC: | This Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically ±1.4nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. Model 2DUTC Sample Certificate (PDF 111KB) |
Model 2D/144nm Pitch
Model 2D/300nm Pitch
Easy to use
The 2D holographic Array with 144nm is recommended because of the unique characteristics that make it especially easy to use.
The pattern is durable and allows for scanning in contact mode, which means that calibration and measurements are faster.
This is the only high resolution 2D calibration standard we know of that has all of the following characteristics that are needed for ease of use:
- 2-dimensional array for simultaneous calibration of X and Y axes
- pitch << 500nm
- array of bumps means the image contrast is high even when the probe tip is slightly dull
- high contrast in contact mode scans
- pattern covers the entire die, no need to hunt for the scan area.
Further Information
| Model 150-2D Very High Resolution Calibration Reference for AFM and SEM AFM Images | |
|---|---|
Tapping Mode 3µm AFM scan | Average height profile from above image |
|  The smooth bumps produce a very regular height profile that gives improved pitch measurement precision. |
 |  |
The bump height is about 90 nm. This specimen is not recommended as a height reference because it is not easy for the standard AFM probes to reach the substrate level between the bumps. The above scans were made in Tapping Mode. | |
Contact Mode 5µm AFM scan | |
| |
| During scanning in contact mode using a 0.5 N/m SiN cantilever, we did not notice any surface or tip wear affecting the image. | |
SEM Characteristics | |
| A leading independent analytical lab examined a Model 150-2D specimen in a Hitachi S4700 FE-SEM. The specimen was mounted using a conductive carbon adhesive tape and easily imaged at high resolution. Four accelerating voltages were used: 1, 5, 10, and 20 kV. No significant charging was observed at any voltage. | |
| High magnification images The following images were captured with a magnification setting of 100 kX. The appearance of the bumps changes with accelerating voltage as expected. At 1 kV, the electrons penetrate only a short distance, giving a surface sensitive image that shows the rounded topography of the bumps. At 5 kV, the bumps have a flat appearance. The edges appear brighter at 10 kV and at 20 kV, the edge contrast is very pronounced. | |
 |  |
| 1KV | 5KV |
 |  |
| 10KV | 20KV |
| Medium Magnification After completing the work, the analyst said: “It was nice to have something with sharp features. | |
 | |
| 20KV | |
| After completing the work, the analyst said: “It was nice to have something with sharp features.” | |
2D Holographic Array Standards
| Period: | 144nm pitch, two-dimensional array. Accurate to 1nm. Refer to calibration certificate for actual pitch.Surface:Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. |
| AFM: | Use in contact, intermittent contact (TappingMode ) and other modes with image sizes from 250nm to 10 m. Available unmounted or mounted on 12mm steel disks. |
| SEM: | This specimen works well at all accelerating voltages. Normally supplied unmounted. Can be mounted on a stub of your choice of SEM Mount |
| Model 2D: | This Calibration Reference specimen comes with a non-traceable, manufacturer s certificate. This states the average period, based on batch measurements. |
| Model 2DUTC: | This Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically 1.4nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16465-2D | 144nm 2D Pattern Calibration Standard, unmounted |
Each | € 1.810,20 | ||
| 16465-2D-A | 144nm 2D Pattern Calibration Standard on Mount A |
Each | € 1.999,70 | ||
| 16465-2D-B | 144nm 2D Pattern Calibration Standard on Mount B |
Each | p.o.r. | ||
| 16465-2D-C | 144nm 2D Pattern Calibration Standard on Mount C |
Each | p.o.r. | ||
| 16465-2D-D | 144nm 2D Pattern Calibration Standard on Mount D |
Each | € 1.999,70 | ||
| 16465-2D-E | 144nm 2D Pattern Calibration Standard on Mount E |
Each | € 1.999,70 | ||
| 16465-2D-F | 144nm 2D Pattern Calibration Standard on Mount F |
Each | € 1.796,40 | ||
| 16465-2D-G | 144nm 2D Pattern Calibration Standard on Mount G, you supply mount |
Each | € 1.999,70 | ||
| 16465-2D-K | 144nm 2D Pattern Calibration Standard on Mount K |
Each | € 1.999,70 | ||
| 16465-2D-L | 144nm 2D Pattern Calibration Standard on Mount L |
Each | € 1.999,70 | ||
| 16465-2D-M | 144nm 2D Pattern Calibration Standard on Mount M |
Each | € 2.586,30 | ||
| 16465-2D-O | 144nm 2D Pattern Calibration Standard on Mount O |
Each | € 2.586,30 | ||
| 16465-2D-P | 144nm 2D Pattern Calibration Standard on Mount P |
Each | € 2.586,30 | ||
| 16465-2D-Q | 144nm 2D Pattern Calibration Standard on Mount Q |
Each | € 2.586,30 | ||
| 16465-2D-R | 144nm 2D Pattern Calibration Standard on Mount R |
Each | € 1.796,40 | ||
| 16465-2D-AFM | 144nm 2D Pattern Calibration Standard on 12mm steel disc |
Each | € 1.999,70 |
2D Holographic Array Standards
| Period: | 144nm pitch, two-dimensional array. Accurate to 1nm. Refer to calibration certificate for actual pitch.Surface:Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. |
| AFM: | Use in contact, intermittent contact (TappingMode ) and other modes with image sizes from 250nm to 10 m. Available unmounted or mounted on 12mm steel disks. |
| SEM: | This specimen works well at all accelerating voltages. Normally supplied unmounted. Can be mounted on a stub of your choice of SEM Mount |
| Model 2D: | This Calibration Reference specimen comes with a non-traceable, manufacturer s certificate. This states the average period, based on batch measurements. |
| Model 2DUTC: | This Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically 1.4nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16465-2DUTC | 144nm 2DUTC Pattern Calibration Standard, unmounted, with certificate |
Each | € 10.952,70 | ||
| 16465-2DUTC-A | 144nm 2DUTC Pattern Calibration Standard, on Mount A, with certificate |
Each | € 9.256,70 | ||
| 16465-2DUTC-B | 144nm 2DUTC Pattern Calibration Standard, on Mount B, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-C | 144nm 2DUTC Pattern Calibration Standard, on Mount C, with certificate |
Each | € 8.838,00 | ||
| 16465-2DUTC-D | 144nm 2DUTC Pattern Calibration Standard, on Mount D, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-E | 144nm 2DUTC Pattern Calibration Standard, on Mount E, with certificate |
Each | p.o.r. | ||
| 16465-2DUTC-F | 144nm 2DUTC Pattern Calibration Standard, on Mount F, with certificate |
Each | € 8.338,10 | ||
| 16465-2DUTC-G | 144nm 2DUTC Pattern Calibration Standard, on Mount G, you supply mount, with certificate |
Each | € 12.064,20 | ||
| 16465-2DUTC-K | 144nm 2DUTC Pattern Calibration Standard, on Mount K, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-L | 144nm 2DUTC Pattern Calibration Standard, on Mount L, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-M | 144nm 2DUTC Pattern Calibration Standard, on Mount M, with certificate |
Each | p.o.r. | ||
| 16465-2DUTC-O | 144nm 2DUTC Pattern Calibration Standard, on Mount O, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-P | 144nm 2DUTC Pattern Calibration Standard, on Mount P, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-Q | 144nm 2DUTC Pattern Calibration Standard, on Mount Q, with certificate |
Each | € 11.907,30 | ||
| 16465-2DUTC-R | 144nm 2DUTC Pattern Calibration Standard, on Mount R, with certificate |
Each | € 8.338,10 | ||
| 16465-2DUTC-AFM | 144nm 2DUTC Pattern Calibration Standard, on 12mm steel disk, with certificate |
Each | € 8.838,00 |
2D Holographic Array Standards
300nm Pitch High Resolution 2D Calibration Standard for AFM, STEM, SEM, Auger and FIB.
| Period: | 300nm pitch nominal, two dimensional array accurate to 1nm. Calibration certificate will give the actual pitch of the standard. |
| Surface Structure: | Aluminum bumps on Silicon, 4x3mm die: Bump height (about 50nm) and width (about 150nm) not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make thousands of measurements without reusing any areas contaminated or altered by previous scans. |
| AFM: | Use in contact, tapping and other modes with image sizes from 500nm to 20nm. Mounted on a 12mm steel AFM disk. |
| SEM: | Auger, FIB: Can be used for a wide range of accelerating voltage (1kV-20kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice, SEM Mount Selection A-R. |
| Certification: | Supplied with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements. |
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16475-1 | 300nm 2D Resolution AFM Reference Standard, unmounted |
Each | € 1.594,40 | ||
| 16475-1A | 300nm 2D Resolution AFM Reference Standard on Mount A |
Each | € 1.788,80 | ||
| 16475-1B | 300nm 2D Resolution AFM Reference Standard on Mount B |
Each | € 1.762,80 | ||
| 16475-1C | 300nm 2D Resolution AFM Reference Standard on Mount C |
Each | € 1.762,80 | ||
| 16475-1D | 300nm 2D Resolution AFM Reference Standard on Mount D |
Each | € 1.762,80 | ||
| 16475-1E | 300nm 2D Resolution AFM Reference Standard on Mount E |
Each | p.o.r. | ||
| 16475-1F | 300nm 2D Resolution AFM Reference Standard on Mount F |
Each | € 1.762,80 | ||
| 16475-1G | 300nm 2D Resolution AFM Reference Standard on Mount G, you supply mount |
Each | € 1.905,70 | ||
| 16475-1K | 300nm 2D Resolution AFM Reference Standard on Mount K |
Each | € 1.707,20 | ||
| 16475-1L | 300nm 2D Resolution AFM Reference Standard on Mount L |
Each | € 1.762,80 | ||
| 16475-1M | 300nm 2D Resolution AFM Reference Standard on Mount M |
Each | € 1.762,80 | ||
| 16475-1O | 300nm 2D Resolution AFM Reference Standard on Mount O |
Each | € 1.762,80 | ||
| 16475-1P | 300nm 2D Resolution AFM Reference Standard on Mount P |
Each | € 1.762,80 | ||
| 16475-1Q | 300nm 2D Resolution AFM Reference Standard on Mount Q |
Each | € 1.762,80 | ||
| 16475-1R | 300nm 2D Resolution AFM Reference Standard on Mount R |
Each | € 1.547,80 | ||
| 16475-1AFM | 300nm 2D Resolution AFM Reference Standard on 12mm steel disc |
Each | € 1.707,20 |
