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Home / Accessories for Microscopy / Nanotechnology / Calibration / SEM Calibration / Critical Dimension Magnification / Etched Si CDMS ISO

Etched Si CDMS ISO

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Etched Si CDMS ISO

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Pelcotec™ Etched Si CDMS ISO
Critical Dimension Magnification Standard

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM
magnification calibration in the X axis from the etched lines.

Available as NIST Traceable or as Certified against NIST Standard

Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).

The Pelcotec™ Etched Si CDMS Calibration Standard is available in two feature size ranges individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.

Pelcotec™ Etched Si CDMS-1T-ISO

Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.

Pelcotec™ Etched Si CDMS -0.1T-ISO

Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x – 200,000x; for all SEM and most FE-SEM applications.

* Pelcotec™ Etched Si CDMS-1C-ISO

Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.

* Pelcotec™ Etched Si CDMS-0.1C-ISO

Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.

Pelcotec™ Technical Notes for CDMS ISO – Critical Dimension Magnification Standards (149KB PDF)

* Recertification in an ISO 17025:2017 accredited calibration laboratory available.

Feature sizes for the Pelcotec™ Etched Si CDMS-1T-IS0 and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm

Feature sizes for the Pelcotec™ Etched Si CDMS-0.1T-ISO and -0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm

500nm, 250nm and 100nm lines are only on the Etched Si CDMS-0.1T-ISO and 0.1C-ISO products

The Pelcotec™ Etched Si CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precision etched lines for features sets from 100nm to 2µm. Due to its sturdy construction, the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ Etched Si CDMS ISO Calibration Standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ Etched Si CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The Etched Si CDMS standard may also be mounted on a custom mount of your choice.

Store the Pelcotec™ Etched Si CDMS ISO Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.

Comparison model 1 and 0.1
 Pelcotec™ Etched Si
CDMS-1-ISO
Pelcotec™ Etched Si
CDMS-0.1-ISO
Substrate: High conductivity silicon (resistivity of 0.001 – 0.002 Ohm/cm)✓✓
Substrate size: 2.5 x 2.5mm✓✓
Substrate thickness: 525 ±10µm✓✓
Unique serial identification number per chip—✓
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm✓✓
Graticule lines perpendicular to the X axis ruled at 10µm, 5µm, 2µm and 1µm pitch✓✓
High Resolution version only – Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch—✓
Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation)T versionsT versions
Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation)C versionsC versions
Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) availableC versions onlyC versions only
Available unmounted✓✓
SEM mounts A-R available✓✓
Precision better than 0.3%✓✓
Line edge roughness of +/- 0.3nm per 1um length of line edge✓✓
Measurements reported with an uncertainty (k=2)* of ±0.012μm✓✓
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Product
Description
SEM Holders
Order
Product

Pelcotec CDMS-1T-ISO, Etched Si
2mm - 1µm, Traceable
no. 707-1 to 707-1S

Description

Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
707-1

Pelcotec CDMS-1T-ISO, Unmounted

Each € 391,20
✓
spinner
707-1A

Pelcotec CDMS-1T-ISO,µmount A

Each € 397,30
✓
spinner
707-1AFM

Pelcotec CDMS-1T-ISO, 12mm AFM Disc

Each € 397,30
✓
spinner
707-1B

Pelcotec CDMS-1T-ISO,µmount B

Each € 397,30
✓
spinner
707-1C

Pelcotec CDMS-1T-ISO,µmount C

Each € 397,30
✓
spinner
707-1D

Pelcotec CDMS-1T-ISO,µmount D

Each € 397,30
✓
spinner
707-1E

Pelcotec CDMS-1T-ISO,µmount E

Each € 397,30
✓
spinner
707-1F

Pelcotec CDMS-1T-ISO,µmount F

Each € 397,30
✓
spinner
707-1G

Pelcotec CDMS-1T-ISO,µmount G

Each p.o.r.
707-1K

Pelcotec CDMS-1T-ISO,µmount K

Each € 397,30
✓
spinner
707-1L

Pelcotec CDMS-1T-ISO,µmount L

Each € 397,30
✓
spinner
707-1M

Pelcotec CDMS-1T-ISO,µmountµm

Each € 397,30
✓
spinner
707-1O

Pelcotec CDMS-1T-ISO,µmount O

Each € 397,30
✓
spinner
707-1P

Pelcotec CDMS-1T-ISO,µmount P

Each € 397,30
✓
spinner
707-1Q

Pelcotec CDMS-1T-ISO,µmount Q

Each € 397,30
✓
spinner
707-1R

Pelcotec CDMS-1T-ISO,µmount R

Each € 397,30
✓
spinner
707-1S

Pelcotec CDMS-1T-ISO,µmount S

Each € 397,30
✓
spinner
Brand: Ted Pella

Product
Description
SEM Holders
Order
Product

Pelcotec CDMS-0.1T-ISO, Etched Si
2mm - 100nm, Traceable
no. 708-01 to 708-01S

Description

Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
708-01

Pelcotec CDMS-0.1T-ISO, Etched Si, Unmounted

Each € 1.476,90
✓
spinner
708-01A

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount A

Each € 1.506,40
✓
spinner
708-01AFM

Pelcotec CDMS-0.1T-ISO, Etched Si, 12mm AFM Disc

Each € 1.506,40
✓
spinner
708-01B

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount B

Each € 1.506,40
✓
spinner
708-01C

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount C

Each € 1.506,40
✓
spinner
708-01D

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount D

Each € 1.506,40
✓
spinner
708-01E

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount E

Each € 1.506,40
✓
spinner
708-01F

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount F

Each € 1.506,40
✓
spinner
708-01G

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount G

Each p.o.r.
708-01K

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount K

Each € 1.506,40
✓
spinner
708-01L

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount L

Each € 1.506,40
✓
spinner
708-01M

Pelcotec CDMS-0.1T-ISO, Etched Si,µmountµm

Each € 1.506,40
✓
spinner
708-01O

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount O

Each € 1.506,40
✓
spinner
708-01P

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount P

Each € 1.506,40
✓
spinner
708-01Q

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount Q

Each € 1.506,40
✓
spinner
708-01R

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount R

Each € 1.506,40
✓
spinner
708-01S

Pelcotec CDMS-0.1T-ISO, Etched Si,µmount S

Each € 1.506,40
✓
spinner
Brand: Ted Pella

Product
Description
SEM Holders
Order
Product

Pelcotec CDMS-XY-1C-ISO,Etched Si
2mm - 1µm, Certified
no. 711-1 to 711-1S

Description

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #711-1-RECERT in the product table below).

SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
711-1

Pelcotec CDMS-XY-1C-ISO, Unmounted

Each € 2.067,60
✓
spinner
711-1A

Pelcotec CDMS-XY-1C-ISO,µmount A

Each € 2.097,10
✓
spinner
711-1AFM

Pelcotec CDMS-XY-1C-ISO, 12mm AFM Disc

Each € 2.097,10
✓
spinner
711-1B

Pelcotec CDMS-XY-1C-ISO,µmount B

Each € 2.097,10
✓
spinner
711-1C

Pelcotec CDMS-XY-1C-ISO,µmount C

Each € 2.097,10
✓
spinner
711-1D

Pelcotec CDMS-XY-1C-ISO,µmount D

Each € 2.097,10
✓
spinner
711-1E

Pelcotec CDMS-XY-1C-ISO,µmount E

Each € 2.097,10
✓
spinner
711-1F

Pelcotec CDMS-XY-1C-ISO,µmount F

Each € 2.097,10
✓
spinner
711-1G

Pelcotec CDMS-XY-1C-ISO,µmount G

Each p.o.r.
711-1K

Pelcotec CDMS-XY-1C-ISO,µmount K

Each € 2.097,10
✓
spinner
711-1L

Pelcotec CDMS-XY-1C-ISO,µmount L

Each € 2.097,10
✓
spinner
711-1M

Pelcotec CDMS-XY-1C-ISO,µmountµm

Each € 2.097,10
✓
spinner
711-1O

Pelcotec CDMS-XY-1C-ISO,µmount O

Each € 2.097,10
✓
spinner
711-1P

Pelcotec CDMS-XY-1C-ISO,µmount P

Each € 2.097,10
✓
spinner
711-1Q

Pelcotec CDMS-XY-1C-ISO,µmount Q

Each € 2.097,10
✓
spinner
711-1R

Pelcotec CDMS-XY-1C-ISO,µmount R

Each € 2.097,10
✓
spinner
711-1S

Pelcotec CDMS-XY-1C-ISO,µmount S

Each € 2.097,10
✓
spinner
711-1-RECERT

Pelcotec CDMS-XY-1C-ISO

Each € 488,90
✓
spinner
Brand: Ted Pella

Product
Description
SEM Holders
Order
Product

Pelcotec CDMS-0.1C-ISO, Etched Si
2mm - 100nm, Certified
no. 712-01 to 712-01S

Description

Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #712-01-RECERT in the product table below).

SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
712-01

Pelcotec CDMS-XY-1C-ISO, Unmounted

Each € 2.953,70
✓
spinner
712-01A

Pelcotec CDMS-0.1C-ISO,µmount A

Each € 2.983,20
✓
spinner
712-01AFM

Pelcotec CDMS-0.1C-ISO, 12mm AFM Disc

Each € 2.983,20
✓
spinner
712-01B

Pelcotec CDMS-0.1C-ISO,µmount B

Each € 2.983,20
✓
spinner
712-01C

Pelcotec CDMS-0.1C-ISO,µmount C

Each € 2.983,20
✓
spinner
712-01D

Pelcotec CDMS-0.1C-ISO,µmount D

Each € 2.983,20
✓
spinner
712-01E

Pelcotec CDMS-0.1C-ISO,µmount E

Each € 2.983,20
✓
spinner
712-01F

Pelcotec CDMS-0.1C-ISO,µmount F

Each € 2.983,20
✓
spinner
712-01G

Pelcotec CDMS-0.1C-ISO,µmount G

Each p.o.r.
712-01K

Pelcotec CDMS-0.1C-ISO,µmount K

Each € 2.983,20
✓
spinner
712-01L

Pelcotec CDMS-0.1C-ISO,µmount L

Each € 2.983,20
✓
spinner
712-01M

Pelcotec CDMS-0.1C-ISO,µmountµm

Each € 2.983,20
✓
spinner
712-01O

Pelcotec CDMS-0.1C-ISO,µmount O

Each € 2.983,20
✓
spinner
712-01P

Pelcotec CDMS-0.1C-ISO,µmount P

Each € 2.983,20
✓
spinner
712-01Q

Pelcotec CDMS-0.1C-ISO,µmount Q

Each € 2.983,20
✓
spinner
712-01R

Pelcotec CDMS-0.1C-ISO,µmount R

Each € 2.983,20
✓
spinner
712-01S

Pelcotec CDMS-0.1C-ISO,µmount S

Each € 2.983,20
✓
spinner
712-01-RECERT

Pelcotec CDMS-0.1C-ISO

Each € 672,30
✓
spinner
Brand: Ted Pella

Contact

Van Loenen Instruments
Penningweg 69 E
1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

BTW/VAT nr. :NL804 608 180 B01
KvK nr. :28038099

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