Products
CDMS-XY ISO
Pelcotec™ CDMS-XY ISO Critical Dimension Magnification Standard
Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM
magnification calibration in the X axis.
These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available in two feature size ranges and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory, for a total of four versions. Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.
Pelcotec™ CDMS-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1T-ISO Traceable Certificate (325KB PDF)
Pelcotec™ CDMS-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x – 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1T-ISO Traceable Certificate (328KB PDF)
* Pelcotec™ CDMS-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Representative CDMS-1C-ISO Conformance Certificate (3680KB PDF)
* Pelcotec™ CDMS-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1C-ISO Conformance Certificate (477KB PDF)
Pelcotec™ Technical Notes for CDMS ISO – Critical Dimension Magnification Standards (149KB PDF)
* Recertification in an ISO 17025:2017 accredited calibration laboratory available.
500nm, 250nm and 100nm lines are only on the CDMS-0.1T-ISO and CDMS-0.1C-ISO product families
Feature sizes for the Pelcotec™ CDMS-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.
Feature sizes for the Pelcotec™ CDMS-0.1T-ISO and 0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec™ CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm.
The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode.
The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard.
Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better.
The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS ISO calibration standard has a unique identification number.
| Pelcotec™ CDMS-XY-1-ISO | Pelcotec™ CDMS-XY-0.1-ISO | |
|---|---|---|
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Unique serial identification number per chip | ✓ | ✓ |
| Calibration squares at 2mm, 1mm, 0.5mm | ✓ | ✓ |
| Graticule lines perpendicular to X and Y axes ruled at 10um, 5µm, 2µm and 1µm pitch | ✓ | ✓ |
| High Resolution version only – Additional graticule lines perpendicular to X and Y axes ruled at 500, 250 and 100nm pitch | — | ✓ |
| Feature material: 50nm Cr (2mm – 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) | — | ✓ |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions | C versions |
| Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available | C versions only | C versions only |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 693-1 | PELCO CDMS-XY-1T, 2mm-1µm, ISO, Unmounted |
Each | € 326,00 | ||
| 693-1A | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount A |
Each | € 358,60 | ||
| 693-1AFM | PELCO CDMS-XY-1T, 2mm-1µm, ISO, 12mm AFM Disc |
Each | € 358,60 | ||
| 693-1B | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount B |
Each | € 358,60 | ||
| 693-1C | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount C |
Each | € 358,60 | ||
| 693-1D | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount D |
Each | € 358,60 | ||
| 693-1E | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount E |
Each | € 358,60 | ||
| 693-1F | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount F |
Each | € 358,60 | ||
| 693-1G | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount G |
Each | p.o.r. | ||
| 693-1K | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount K |
Each | € 358,60 | ||
| 693-1L | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount L |
Each | € 358,60 | ||
| 693-1M | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmountµm |
Each | € 358,60 | ||
| 693-1O | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount O |
Each | € 358,60 | ||
| 693-1P | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount P |
Each | € 358,60 | ||
| 693-1Q | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount Q |
Each | € 358,60 | ||
| 693-1R | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount R |
Each | € 358,60 | ||
| 693-1S | PELCO CDMS-XY-1T, 2mm-1µm, ISO,µmount S |
Each | € 358,60 |
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SE, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 694-01 | PELCO CDMS-XY-0.1T, 2mm-100nm, Unmounted |
Each | € 1.575,40 | ||
| 694-01A | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount A |
Each | € 1.604,90 | ||
| 694-01AFM | PELCO CDMS-XY-0.1T, 2mm-100nm, 12mm AFM Disc |
Each | € 1.604,90 | ||
| 694-01B | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount B |
Each | € 1.604,90 | ||
| 694-01C | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount C |
Each | € 1.604,90 | ||
| 694-01D | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount D |
Each | € 1.604,90 | ||
| 694-01E | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount E |
Each | € 1.604,90 | ||
| 694-01F | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount F |
Each | € 1.604,90 | ||
| 694-01G | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount G |
Each | p.o.r. | ||
| 694-01K | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount K |
Each | € 1.604,90 | ||
| 694-01L | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount L |
Each | € 1.604,90 | ||
| 694-01M | PELCO CDMS-XY-0.1T, 2mm-100nm,µmountµm |
Each | € 1.604,90 | ||
| 694-01O | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount O |
Each | € 1.604,90 | ||
| 694-01P | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount P |
Each | € 1.604,90 | ||
| 694-01Q | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount Q |
Each | € 1.604,90 | ||
| 694-01R | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount R |
Each | € 1.604,90 | ||
| 694-01S | PELCO CDMS-XY-0.1T, 2mm-100nm,µmount S |
Each | € 1.604,90 |
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #697-1-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 697-1 | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified, Unmounted |
Each | € 2.166,10 | ||
| 697-1A | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount A |
Each | € 2.195,60 | ||
| 697-1AFM | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified, 12mm AFM Disc |
Each | € 2.195,60 | ||
| 697-1B | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount B |
Each | € 2.195,60 | ||
| 697-1C | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount C |
Each | € 2.195,60 | ||
| 697-1D | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount D |
Each | € 2.195,60 | ||
| 697-1E | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount E |
Each | € 2.195,60 | ||
| 697-1F | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount F |
Each | € 2.195,60 | ||
| 697-1G | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount G |
Each | p.o.r. | ||
| 697-1K | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount K |
Each | € 2.195,60 | ||
| 697-1L | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount L |
Each | € 2.195,60 | ||
| 697-1M | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmountµm |
Each | € 2.195,60 | ||
| 697-1O | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount O |
Each | € 2.195,60 | ||
| 697-1P | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount P |
Each | € 2.195,60 | ||
| 697-1Q | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount Q |
Each | € 2.195,60 | ||
| 697-1R | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount R |
Each | € 2.195,60 | ||
| 697-1-RECERT | Recertification Service for the 697-1 through 697-1S family of ISO CDMS Products |
Each | € 827,10 | ||
| 697-1S | Pelcotec CDMS-XY-1C-ISO, 2mm – 1µm, Certified,µmount S |
Each | € 2.195,60 |
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm.
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #698-01-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 698-01 | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount 1, Unmounted |
Each | € 3.150,60 | ||
| 698-01A | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount A,µmount A |
Each | € 3.180,20 | ||
| 698-01AFM | PELCO CDMS-XY-0.1C, 2mm-100nm,µmountµm, 12mm AFM Disc |
Each | € 3.180,20 | ||
| 698-01B | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount B,µmount B |
Each | € 3.180,20 | ||
| 698-01C | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount C,µmount C |
Each | € 3.180,20 | ||
| 698-01D | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount D,µmount D |
Each | € 3.180,20 | ||
| 698-01E | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount E,µmount E |
Each | € 3.180,20 | ||
| 698-01F | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount F,µmount F |
Each | € 3.180,20 | ||
| 698-01G | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount G,µmount G |
Each | p.o.r. | ||
| 698-01K | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount K,µmount K |
Each | € 3.180,20 | ||
| 698-01L | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount L,µmount L |
Each | € 3.180,20 | ||
| 698-01M | PELCO CDMS-XY-0.1C, 2mm-100nm,µmountµm,µmountµm |
Each | € 3.180,20 | ||
| 698-01O | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount O,µmount O |
Each | € 3.180,20 | ||
| 698-01P | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount P,µmount P |
Each | € 3.180,20 | ||
| 698-01Q | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount Q,µmount Q |
Each | € 3.180,20 | ||
| 698-01R | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount R,µmount R |
Each | € 3.180,20 | ||
| 698-01-RECERT | Recertification Service for the 698-01 through 698-01S family of ISO CDMS Products |
Each | € 1.181,50 | ||
| 698-01S | PELCO CDMS-XY-0.1C, 2mm-100nm,µmount S,µmount S |
Each | € 3.180,20 |
