Products
AFM, STM, SPM Calibration
Block Test Gratings for Z-axis
Selection of 3 block type test gratings with different step heights intended for Z-axis calibration of scanning probe microscopes and linearity measurements.
| Structure: | Si Wafer with SiO2 layer for grating |  |
| Pattern type: | 1-Dimensional (in Z-axis direction) | |
| Step heights: | 20 1.5nm for TGZ-20 110 2nm for TGZ-100 520 3nm for TGZ-500 |
|
| Period: | 3 ±0.01 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
Note: Values for step heights are nominal; actual step height is given with the product and could be 5%
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-10 | Calibration grating TGZ-20, Z=18.5nm, unmounted |
Each | € 326,00 | ||
| 629-10AFM | Calibration grating TGZ-20, Z=18.5nm, mounted on 12mm AFM disc |
Each | € 342,30 | ||
| 629-20 | Calibration grating TGZ-100, Z=108.5nm, unmounted |
Each | € 326,00 | ||
| 629-20AFM | Calibration grating TGZ-100, Z=108.5nm, mounted on 12mm AFM disc |
Each | € 342,30 | ||
| 629-30 | Calibration grating TGZ-500, Z=535.5nm, unmounted |
Each | € 326,00 | ||
| 629-30AFM | Calibration grating TGZ-500, Z=535.5nm, mounted on 12mm AFM disc |
Each | € 342,30 |
Triangular Test Grating for X- or Y-axis
The TGT-1500 test grating is intended for SPM calibration in X- or Y-axis, determination of lateral and vertical scanner nonlinearity, detection of angular distortion and tip characterization.
Nominal values for height and pitch are given below. Actual values come with the test grating.
| Structure: | Si wafer with grating in top surface |  |
| Pattern type: | 1-D array of triangular steps with precise linear and angular dimensions |
|
| Edge angle: | approximately 70 degrees | |
| Edge Radius: | ?10nm | |
| Pattern Height: | 1.8 m – non-calibrated, for information only | |
| Pitch: | 3 ±0.01 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-40 | Test grating TGT-1500, 3 m pitch, unmounted |
Each | € 306,40 | ||
| 629-40AFM | Test grating TGT-1500, 3 m pitch, mounted on 12mm AFM disc |
Each | € 326,00 |
Test Grating for Tip Sharpness
The TGTZ-400 test grating is intended for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control.
| Structure: | Si wafer with grating in top surface |  |
| Pattern type: | Array of sharp tips | |
| Tip angle: | About 50 degrees | |
| Tip height: | 0.3 – 0.7 µm | |
| Period: | 3 ±0.01 µm | |
| Diagonal period: | 2.12 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 2 x 2mm |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-50 | Test grating TGTZ-400, 300-700nm tips, unmounted |
Each | € 611,10 | ||
| 629-50AFM | Test grating TGTZ-400, 300-700nm tips, mounted on 12mm AFM disc |
Each | € 626,40 |
Test Grating for Lateral Calibration
The TG3D-3000/600 test grating with its 3-Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross-coupling effects and for determination of the tip aspect ratio.
| Structure: | Si wafer with grating in top surface | 
|
| Pattern type: | Chessboard like array of square pillars with sharp undercut edges |
|
| Height: | 0.3 – 0.6 µm | |
| Top square size | 1.2 x 1.2 µm | |
| Edge radius: | ≤10nm | |
| Period: | 3 ±0.05 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm | |
Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-60 | Test grating TG3D-3000/600, pillars, unmounted |
Each | € 449,60 | ||
| 629-60AFM | Test grating TG3D-3000/600, pillars, mounted on 12mm AFM disc |
Each | € 472,30 |
Test Grating for X-, Y- and Z-direction
The TG3D-3000/20 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.
| Structure: | Si wafer with SiO2 layer for grating |  |
| Pattern type: | 3-Dimensional array of small squares | |
| Height: | 20 ±1.5nm | |
| Square size: | 1.5 ±0.15 µm | |
| Period: | 3 ±0.05 µm | |
| Chip size: | 5 x 5 x 0.5mm | |
| Effective area: | Central square of 3 x 3mm |
Note: The precision on the height is based on the measurement of 5 gratings (randomly selected from a batch of 300 gratings) by an SPM calibrated by a PTB certified TGZ-20 grating.
The basic step height can vary from the specified one within 10% (example: step height can be 22 1.5nm).
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-70 | Test grating TG3D-3000/20, squares, unmounted |
Each | € 611,10 | ||
| 629-70AFM | Test grating TG3D-3000/20, squares, mounted on 12mm AFM disc |
Each | € 626,40 |
SiC-STEP Calibration Samples
6H-SiC (0001) based calibration sample which is designed to perform easy calibrations of an AFM scanner’s vertical movements in several nanometers interval.
The simplicity of calibration of the calibration process is provided by the nearly uniform distribution of half-monolayer high steps (either 0.75 or 1.5nm) on the sample surface demonstrating both chemical and mechanical stability.
The step height corresponds to the half of the lattice constant of the 6H-SiC crystal in the (0001) direction.
| Specifications: | SiC / 0.75 | SiC / 1.5 |
|---|---|---|
| Structure: | SiC with Steps | |
| Single Step Height: | 0.75nm | 1.5nm |
| Average Inter Step Distance: | 0.15-0.4 µm | 0.2-0.5 µm |
| Misorientation of Surface: | ~0.2 | ~0.3 |
| Average Roughness of Area Between Steps (terraces): | 0.09nm | |
| Chip Size: | 5 x 5 x 0.3mm | |
 |
 |
| SiC/0.75 | SiC/1.5 |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 629-85 | SiC-STEP Calibration Sample with 0.75nm Step Height, unmounted |
Each | € 403,40 | ||
| 629-85AFM | SiC-STEP Calibration Sample with 0.75nm Step Height, mounted on 12mm AFM disc |
Each | € 426,60 | ||
| 629-90 | SiC-STEP Calibration Sample with 1.50nm Step Height, unmounted |
Each | € 403,40 | ||
| 629-90AFM | SiC-STEP Calibration Sample with 1.50nm Step Height, mounted on 12mm AFM disc |
Each | € 426,60 |
Grating type TGX
The silicon calibration grating from the TGX series is an array of square holes with sharp undercut edges formed by the (110) crystallographic planes of silicon.
The typical radius of the edges is less than 5 nm.
Application
The TGX calibration gratings are intended for lateral calibration of SPM scanners. They can also be used for:
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects
- determination of the tip aspect ratio
For accurate quantification of images of calibration gratings from the TGX series, we recommend using the Scanning Probe Image Processor (SPIP) designed by Image Metrology.
| Cat. no. | Grating type | Step height µm* |
Pitch µm |
Accuracy µm |
Edge radii mm |
Active area mm |
Chip dims. mm |
|---|---|---|---|---|---|---|---|
| AGF7026 | TGX01 | 1 | 3.0 | 0.1 | <5 | 1 x 1 | 5 x 5 x 0.3 |
* The step height value is given for information only, not for vertical calibration purposes
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| AGF7026 | Grating Type TGX01 3 Micron Pitch |
Each | p.o.r. |
Calibration gratings from the TGXYZ series are arrays of different structures comprising rectangular silicon dioxide steps on a silicon wafer. The small square in the center with dimensions 500μm by 500μm includes circular pillars and holes, as well as lines in the X- and Y- direction with a pitch of 5μm. The large square with dimensions 1mm by 1mm contains square pillars and holes with a pitch of 10μm.
The TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners. The vertical non-linearity can be compensated for by using several calibration gratings with different nominal step heights.
The TGXYZ series of Calibration Gratings are supplied mounted on a round 12mm dia metal plate. They are also available unmounted if required.
Active area: 1 x 1mm
Chip dimensions: 5 x 5 x 0.3mm
| Cat. no. | Part number | Step height* | Height accuracy | Pitch | Pitch accuracy |
|---|---|---|---|---|---|
| AGF7021 | TGXYZ01 | 20nm | 2% | 5 and 10μm | 0.1μm |
| AGF7022 | TGXYZ02 | 100nm | 3% | 5 and 10μm | 0.1μm |
| AGF7023 | TGXYZ03 | 500nm | 3% | 5 and 10μm | 0.1μm |
* The step height value is given for information only, not for vertical calibration purposes
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| AGF7021 | Grating TGXYZ01 Step Height 20nm |
Each | p.o.r. | ||
| AGF7022 | Grating TGXYZ02 Step Height 100nm |
Each | p.o.r. | ||
| AGF7023 | Grating TGXYZ03 Step Height 500nm |
Each | p.o.r. |
