Products
CDMS ISO
Pelcotec™ CDMS Critical Dimension Magnification Standards
Easy to use and very useful for quick and precise
SEM, FESEM, FIB, CD-SEM, LM, and AFM magnification calibration calibration in the X axis.
Available as NIST Traceable or as Certified against NIST Standard
These calibration standards are unique, economically priced, yet fully-featured and traceable for a wide measurement range.
They are made using the latest semiconductor and MEMS manufacturing techniques.
The Pelcotec™ CDMS Calibration Standard is available in two feature size ranges and as traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) or individually certified to a NIST standard in an ISO 17205:2017 accredited calibration laboratory, for a total of four versions.
Recertification of these ISO critical dimension standards in an ISO 17205:2017 accredited calibration laboratory is available.
Pelcotec™ CDMS-1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 1um for a magnification range from 10x – 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Pelcotec™ CDMS-0.1T-ISO
Fully traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation). Has features from 2.0mm to 100nm for a magnification range from 10x – 200,000x; for all SEM and most FE-SEM applications.
* Pelcotec™ CDMS-1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard. Has features from 2.0mm to 1µm for a magnification range from 10x – 20,000x; ideal for desk top SEMs and low to medium magnification applications.
* Pelcotec™ CDMS-0.1C-ISO
Individually certified in an ISO 17205:2017 accredited calibration laboratory against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x – 200,000x; for all SEM and most FE-SEM applications.
* Recertification in an ISO 17025:2017 accredited calibration laboratory available.
Feature sizes for the Pelcotec™ CDMS-1T-ISO and -1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm.
Feature sizes for the Pelcotec™ CDMS-0.1T-ISO and 0.1C-ISO are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm.
The Pelcotec™ CDMS ISO Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precise 50nm chromium deposition for the features up to 5µm and a combination of 50nm gold over 20nm chromium for the features from 2µm to 100nm. The Cr and Au/Cr on Si provide excellent contrast both in SE and BSE imaging mode. The features are easier to determine than on etched Si standards. Since the silicon substrate, the chromium and the chromium/gold features are all conductive, there are no charging issues with this calibration standard. Due to its sturdy construction the CDMS standard can be cleaned using a plasma cleaner on low settings.
The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better.
The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ CDMS ISO calibration standard has a unique identification number.
They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ CDMS ISO is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.
The CDMS standard may also be mounted on a custom mount of your choice.
Store the Pelcotec™ CDMS ISO Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
| OPelcotec™ CDMS-1-ISO | Pelcotec™ CDMS-0.1-ISO | |
|---|---|---|
| Substrate: Silicon | ✓ | ✓ |
| Substrate size: 2.5 x 2.5mm | ✓ | ✓ |
| Substrate thickness: 525 ±10µm | ✓ | ✓ |
| Unique serial identification number per chip | ✓ | ✓ |
| Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm | ✓ | ✓ |
| Graticule lines perpendicular to the X axis ruled at 10µm, 5µm, 2µm and 1µm pitch | ✓ | ✓ |
| High Resolution version only – Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch | — | ✓ |
| Feature material: 50nm Cr (2mm – 5µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (2µm and 1µm) | ✓ | ✓ |
| Feature material: 20nm Cr/50nm Au (500, 250 and 100nm) | — | ✓ |
| Traceable at the wafer level to NIST (ISO 17025:2017 Sampling Scope of Accreditation) | T versions | T versions |
| Direct certification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) | C versions | C versions |
| Recertification of CDMS chip to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) available | C versions only | C versions only |
| Available unmounted | ✓ | ✓ |
| SEM mounts A-R available | ✓ | ✓ |
| Precision better than 0.3% | ✓ | ✓ |
Traceable at the wafer level to NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 692-01 | PELCO CDMS-0.1T, 2mm-100nm, ISO, Unmounted |
Each | € 935,40 | ||
| 692-01A | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount A |
Each | € 954,60 | ||
| 692-01AFM | PELCO CDMS-0.1T, 2mm-100nm, ISO, 12mm AFM Disc |
Each | € 954,60 | ||
| 692-01B | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount B |
Each | € 954,60 | ||
| 692-01C | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount C |
Each | € 954,60 | ||
| 692-01D | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount D |
Each | € 954,60 | ||
| 692-01E | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount E |
Each | € 954,60 | ||
| 692-01F | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount F |
Each | € 954,60 | ||
| 692-01G | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount G |
Each | p.o.r. | ||
| 692-01K | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount K |
Each | € 954,60 | ||
| 692-01L | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount L |
Each | € 954,60 | ||
| 692-01M | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmountµm |
Each | € 954,60 | ||
| 692-01O | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount O |
Each | € 954,60 | ||
| 692-01P | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount P |
Each | € 954,60 | ||
| 692-01Q | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount Q |
Each | € 954,60 | ||
| 692-01R | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount R |
Each | € 954,60 | ||
| 692-01S | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount S |
Each | € 954,60 | ||
| 692-1O | PELCO CDMS-0.1T, 2mm-100nm, ISO,µmount O |
Each | € 915,70 |
Pelcotec™ CDMS-1C-ISO
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #695-1-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 695-1 | PELCO CDMS-1C, 2mm-1µm, ISO, Unm, Unmounted |
Each | € 1.230,80 | ||
| 695-1A | PELCO CDMS-1C, 2mm-1µm, ISO, A,µmount A |
Each | € 1.260,30 | ||
| 695-1AFM | PELCO CDMS-1C, 2mm-1µm, ISO, AFM, 12mm AFM Disc |
Each | € 1.260,30 | ||
| 695-1B | PELCO CDMS-1C, 2mm-1µm, ISO, B,µmount B |
Each | € 1.260,30 | ||
| 695-1C | PELCO CDMS-1C, 2mm-1µm, ISO, C,µmount C |
Each | € 1.260,30 | ||
| 695-1D | PELCO CDMS-1C, 2mm-1µm, ISO, D,µmount D |
Each | € 1.260,30 | ||
| 695-1E | PELCO CDMS-1C, 2mm-1µm, ISO, E,µmount E |
Each | € 1.260,30 | ||
| 695-1F | PELCO CDMS-1C, 2mm-1µm, ISO, F,µmount F |
Each | € 1.260,30 | ||
| 695-1G | PELCO CDMS-1C, 2mm-1µm, ISO, G,µmount G |
Each | p.o.r. | ||
| 695-1K | PELCO CDMS-1C, 2mm-1µm, ISO, K,µmount K |
Each | € 1.260,30 | ||
| 695-1L | PELCO CDMS-1C, 2mm-1µm, ISO, L,µmount L |
Each | € 1.260,30 | ||
| 695-1M | PELCO CDMS-1C, 2mm-1µm, ISO,µm,µmountµm |
Each | € 1.260,30 | ||
| 695-1O | PELCO CDMS-1C, 2mm-1µm, ISO, O,µmount O |
Each | € 1.260,30 | ||
| 695-1P | PELCO CDMS-1C, 2mm-1µm, ISO, P,µmount P |
Each | € 1.260,30 | ||
| 695-1Q | PELCO CDMS-1C, 2mm-1µm, ISO, Q,µmount Q |
Each | € 1.260,30 | ||
| 695-1R | PELCO CDMS-1C, 2mm-1µm, ISO, R,µmount R |
Each | € 1.260,30 | ||
| 695-1-RECERT | Recertification Service for the 695-1 through 695-1S family of ISO CDMS Products |
Each | € 488,90 | ||
| 695-1S | PELCO CDMS-1C, 2mm-1µm, ISO, S,µmount S |
Each | € 1.260,30 |
Pelcotec™ CDMS-0.1C-ISO
Certified to a NIST standard in an ISO 17205:2017 accredited calibration lab with features from 2mm to 100nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm
Recertification service in an ISO 17025:2017 accredited calibration laboratory available (see #696-01-RECERT in the product table below).
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 696-01 | PELCO CDMS-0.1C, 2mm-100nm, ISO, Unmounted |
Each | € 1.870,70 | ||
| 696-01A | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount A |
Each | € 1.900,30 | ||
| 696-01AFM | PELCO CDMS-0.1C, 2mm-100nm, ISO, 12mm AFM Disc |
Each | € 1.900,30 | ||
| 696-01B | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount B |
Each | € 1.900,30 | ||
| 696-01C | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount C |
Each | € 1.900,30 | ||
| 696-01D | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount D |
Each | € 1.900,30 | ||
| 696-01E | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount E |
Each | € 1.900,30 | ||
| 696-01F | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount F |
Each | € 1.900,30 | ||
| 696-01G | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount G |
Each | p.o.r. | ||
| 696-01K | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount K |
Each | € 1.900,30 | ||
| 696-01L | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount L |
Each | € 1.900,30 | ||
| 696-01M | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmountµm |
Each | € 1.900,30 | ||
| 696-01O | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount O |
Each | € 1.900,30 | ||
| 696-01P | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount P |
Each | € 1.900,30 | ||
| 696-01Q | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount Q |
Each | € 1.900,30 | ||
| 696-01R | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount R |
Each | € 1.900,30 | ||
| 696-01-RECERT | Recertification Service for the 696-01 through 696-01S family of ISO CDMS Products |
Each | € 672,30 | ||
| 696-01S | PELCO CDMS-0.1C, 2mm-100nm, ISO,µmount S |
Each | € 1.900,30 |
Traceable at the wafer level to a NIST standard (ISO 17025:2017 Sampling Scope of Accreditation) with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.
Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm
SEM Holders
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 | |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 | |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 | |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 | |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 | |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 | |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 | |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 | |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 | |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 | |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 | |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 | |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 691-1 | PELCO CDMS-1T, 2mm-1µm, ISO, Unmounted |
Each | € 206,50 | ||
| 691-1A | PELCO CDMS-1T, 2mm-1µm, ISO,µmount A |
Each | € 228,20 | ||
| 691-1AFM | PELCO CDMS-1T, 2mm-1µm, ISO, 12mm AFM Disc |
Each | € 228,20 | ||
| 691-1B | PELCO CDMS-1T, 2mm-1µm, ISO,µmount B |
Each | € 228,20 | ||
| 691-1C | PELCO CDMS-1T, 2mm-1µm, ISO,µmount C |
Each | € 228,20 | ||
| 691-1D | PELCO CDMS-1T, 2mm-1µm, ISO,µmount D |
Each | € 228,20 | ||
| 691-1E | PELCO CDMS-1T, 2mm-1µm, ISO,µmount E |
Each | € 228,20 | ||
| 691-1F | PELCO CDMS-1T, 2mm-1µm, ISO,µmount F |
Each | € 228,20 | ||
| 691-1G | PELCO CDMS-1T, 2mm-1µm, ISO,µmount G |
Each | p.o.r. | ||
| 691-1K | PELCO CDMS-1T, 2mm-1µm, ISO,µmount K |
Each | € 228,20 | ||
| 691-1L | PELCO CDMS-1T, 2mm-1µm, ISO,µmount L |
Each | € 228,20 | ||
| 691-1M | PELCO CDMS-1T, 2mm-1µm, ISO,µmountµm |
Each | € 228,20 | ||
| 691-1O | PELCO CDMS-1T, 2mm-1µm, ISO,µmount O |
Each | € 228,20 | ||
| 691-1P | PELCO CDMS-1T, 2mm-1µm, ISO,µmount P |
Each | € 228,20 | ||
| 691-1Q | PELCO CDMS-1T, 2mm-1µm, ISO,µmount Q |
Each | € 228,20 | ||
| 691-1R | PELCO CDMS-1T, 2mm-1µm, ISO,µmount R |
Each | € 228,20 | ||
| 691-1S | PELCO CDMS-1T, 2mm-1µm, ISO, 25 x 75mm glass slide |
Each | € 228,20 |
