Skip to content
+ 31 (0)75 614 90 40
info@loeneninstruments.com
Contact
  • Log In | Log Out
  • Register
  • Account details
  • Log In | Log Out
  • Register
  • Account details
€ 0,00 0 Cart
×
  • Accessories for Microscopy
  • Instruments
  • Accessories for Microscopy
  • Instruments
Home / Accessories for Microscopy / Calibration / SEM Calibration / (CD) Calibration Test

Products

(CD) Calibration Test

  • Adhesives
    • Conductive
    • Mounting Adhesives
    • Non Conductive
      • Non Conductive
      • Tapes
    • Tabs, Tapes & Sheets
  • AFM & SPM
    • AFM-STM Supplies
    • Colloids & Nanoparticles
      • Gold and Silica Shell Gold Colloid
      • Highly Uniform Gold Particles
      • Silver Colloids & Nanoparticles
    • Substrates
  • Apertures
    • Apertures 1,85 x 0,1mm
    • Apertures 2,0 x 0,1mm
    • Apertures 2,0 x 0,25mm
    • Apertures 2,0 x 0,6mm
    • Apertures 3,0 x 0,1mm
    • Apertures 3,0 x 0,25mm
    • Apertures 3,04 x 0,25mm
    • Apertures 4,0 x 0,2mm
    • Apertures 4,0 x 0,6mm
    • Apertures 6.35 x 0.02mm
    • Apertures 6,35 x 0,125mm
    • Apertures 10,0 x 0,1mm
    • Apertures 10,0 x 0,6mm
    • Apertures 12,0 x 0,1mm
    • Apertures 19,99 x 0,25mm
    • Gilded strip apertures
    • Multihole Strip Apertures
    • Spray Apertures
    • Thin Foil Apertures
    • Tantalum Wehnelt
    • Top Hat Apertures
    • Aperture Cleaning
  • Brushes
  • Calibration
    • AFM Calibration
      • AFM Gold Calibration Kit
      • AFM-SPM calibration
      • High Resolution Calibration
      • MRS-3
      • MRS-4
      • MRS-6
      • Test Gratings
      • Very High Resolution Calibration
    • Calibration Calculators
    • EDS/WDS/EPMA/XPS
      • NiOx Test Specimen
      • Pelco Faraday Cup
      • UHV-EL Reference Standards
      • X-Ray References Calibration
      • XCS EDS Calibration
    • GSR & Particle Analysis
    • Light Microscopy
      • LM Calibration Standards
      • Stage Micrometers
      • Stage Micrometers Pro Series
    • SEM Calibration
      • (CD) Calibration Test
      • Back Scattered Electron Test
      • Boron substrates
      • Chessy test specimen
      • Critical Dimension Magnification Standards
        • CDMS
        • CDMS ISO
        • CDMS-XY
        • CDMS-XY ISO
        • Etched Si CDMS
        • Etched Si CDMS-XY
        • Etched Si CDMS ISO
        • EEtched Si CDMS-XY ISO
      • Demonstration Specimens
      • Glass size standards
      • Gold on Carbon
      • Gold Spheres on Carbon
      • Line/Grid Standards
      • Low & Medium Magnification
      • MRS-3
      • MRS-4
      • MRS-6
      • Multi Calibration Standard
      • Polystyrene Spheres
      • Silicon test specimen
      • Tin on Carbon
    • TEM Calibration
      • Astigmatism Correction
      • Calibration Test Kit
      • Lattice Plane Resolution Checks
      • MAG*I*CAL
      • TEM/STEM Test Specimens
  • Chemicals
    • Buffers
    • Citifluor
    • De- and rehydrating agents
    • Embedding
      • Embedding Components
      • Embedding kits
      • Mountants
    • Fixatives
    • Stains
      • Stains for EM
      • Stains for LM
  • Cleaning
    • Anti-Static Products
    • Applicator, Sticks & Swabs
    • Cleaning Brushes
    • Cleaning Detergents
    • Lab Bench Cover, Spill Tray
    • Polishing Compounds
    • Pressurized Cleaners
    • ProPette
    • Skin Protectants
    • Spill Response Kits
    • Ultrasonic Cleaners
    • Wipes, Cloths and Tissues
  • Cryo Products
    • Cryo Accessories
    • Cryo Embedding
    • Cryo Gloves & Aprons
      • Cryo Aprons
      • Cryo Gloves
      • Waterproof Cryo Gloves
    • Cryo Pucks
    • Cryo Storage
    • Dewar Flasks
      • Bio Series
      • Enamelled steel
      • High Capacity
      • Low Form, Wide Neck
      • Stainless Steel
    • Eyelashes
    • Laboratory Tape
    • UltrAuFoil® Holey Gold Films
    • Vitrobot Consumables
  • Desiccators Cabinets
    • Acrylic
    • Black Desiccator Cabinets
    • Desiccant
    • Desiccator Accessories
    • Large Capacity
    • Small
    • Vacuum Desiccators
  • Diamond Knives
    • AFM
    • Cryo 35 Wet-Dry
    • Cryo 45° Wet – Dry
    • Cryo Immuno
    • Cryotrim
    • Histo
    • Histo Cryo Wet – Dry
    • Histo Jumbo
    • Ultra 35°
    • Ultra 45°
    • Ultra Sonic
    • Diamond Knife Cleaning
  • Dissection
    • Blades
    • Bone Cutters
    • Bone Saws
    • Brain and Biopsy Punches
    • Elevators & Dissectors
    • Forceps
      • Aesculap® Forceps
      • General Purpose
      • LED Forceps and Scissors
      • Locking Forceps
    • Scalpels
    • Scissors
      • Aesculap®
      • General Lab
      • General Purpose
      • Micro Scissors
  • Embedding
    • ACLAR® Film
    • Beem® Products
      • BEEM® Capsules
      • BEEM® Storage
    • Castable Embedding Supplies
    • Critical Point Dryer Accessories
    • Disposable Molds
    • Embedding Cassettes
    • Embedding Media
    • Embedding Molds
    • Gelatin Capsules
    • Multi- and Flexible Molds
    • PELCO Locator Molds
    • Syringes & Pipettes
  • FIB Supplies
    • Grid & Sample Holders
    • Omniprobe Supplies
    • PELCO FIB Lift-Out Grids
      • Carb-N-Grids
      • PELCO® Indicator FIB Lift-Out TEM Grids
      • PELCO® FIB Lift-Out TEM Grids
  • Filaments
    • Denka M-3 LaB6 Cathodes
    • Kimball LaB6 Cathodes
    • SEM/TEM Filaments
  • Forensics
    • Carbon Tweezers
    • Forensic Supplies
    • GSR Calibration Kit
  • General Lab Supplies
    • Applicator, Sticks and Swabs
    • Beakers, Cylinders and Containers
    • Cell Strainer System
    • Dishes and Boats
    • Glass Bottom Dishes
    • Laboratory Glassware
    • Laboratory Tongs
    • Microscopy Illuminators
    • Microwave Specimen Holders
    • Parafilm M®, Melinex Film
    • PELCO Rotators
      • R1 Single Speed Rotator
      • R2 Variable Speed Rotator
      • R2 Rotator with Heads with Clips for Test Tubes
    • Petri Dishes
    • Pocket Scales
    • Spatulas & Spoons
    • Storage Jars, Containers & Bottles
      • Bottle Top Dispensers
      • Diamond RealSeal™ Bottles
      • Plastic Carboys
      • RealSeal™ Plastic Bottles
      • Vials and Bottles
    • Thermometers
    • Timers
    • Ultraviolet Lamps
    • Vials, Tubes and Cups
    • Wire Mesh
  • Gloves
    • Gloves for Cryo Applications
    • Laboratory Gloves
  • Grids
    • Grid Staining Matrix System
    • SEM Grids
    • TEM Grids
      • Agar Grids
      • Athene TEM Grids
      • Gilder TEM Grids
      • Grid Coating
      • Grid Holder Blocks
      • Maxtaform™ Grids
      • Pelco Special Metal Grids
      • Pelco TEM Grids
      • QUANTIFOIL® TEM Substrates
      • Reference/Finder Grids
      • Special TEM Grids
      • Staining Pads
      • StrataTek™ TEM Grids
      • SynapTek™ Grids
      • Veco Grids
    • TEM Support Films
      • Carbon
      • Formvar
      • Formvar Carbon
      • Graphene
        • Graphene Oxide Films
        • Graphene TEM
      • Holey Carbon
      • Holey Silicon Nitride
      • Lacey Films
      • Si3N4 Support Film for CLEM
      • Silicon Aperture Frames
      • Silicon Nitride Support Films
      • Silicon Nitride X-Ray Windows
      • UltrAuFoil® Holey Gold Films
  • Histology
    • Citifluor Antifadent
    • Cleaning Products
    • Cryo Sectioning & Storage
      • Cryo Embedding Media
      • Cryo Label Systems
      • Cryo Storage systems
      • Tissue Marking Dyes
    • Embedding & Sectioning
      • Disposable Histology Molds
      • Laboratory Label Systems
      • Mold Kits
      • PAP Pens
    • Glass Bottom Dishes
    • Gross Dissection Tools
      • Dissection Tools
      • LED Forceps and Scissors
      • Tissue Slicing Systems
    • Grossing & Processing
      • Beakers, Cylinders and Containers
      • Blades
      • Embedding Cassettes
      • Marking Pens
      • Mortar & Pestle Sets
      • Vials, Tubes and Cups
    • Histology Instruments
      • CellTec Activated Carbon Filters
      • Hotplates and Centrifuges
      • Magnetic Stirrers
      • Manual Rotary Microtome
      • Paraffin Dispenser, trimmers
      • PELCO BioWave Pro+
      • Pocket Scales
      • Slide Dryers
      • Slide Warmers
      • Thermometers
      • Tissue Section Bath
      • Tissue Slicing
        • SliceMaster
        • TruSlice Digital
        • TruSlice TruSlice Manual
      • Water Baths
    • Immersion Oils
    • Laboratory Tape
    • Microscope Slides
      • Glass Microscope Slides
      • Large Slides
      • Plastic Microscope Slides
      • Quartz Slides and Coverslips
    • Pipettes and Pipettors
      • ali-Q 2 Pipette Controllers
      • Ovation® Pipettes
      • ProPette™ LE Single Channel Pipettors
      • Wobble-Not Pipettes
      • Pipettor Racks
      • Reagent Reservoirs
      • Pipettes tips
        • Universal Pipette tips
        • VistaLab Pipette Tips
      • Plastic Pasteur Pipettes
    • PTFE Laboratory Products
    • Razor- Microtome Blades
    • Safety Products
    • Slide Boxes, Trays & Mailers
    • Slide Labels
    • Spatulas and Spoons
    • Staining
      • Containers with Lid
      • Mounting Media
      • Slide DrainRack
      • Slide Staining System
      • Staining Jars & Racks
      • Vials, Tubes and Cups
    • Weighing Dishes
  • Magnifiers
    • 3D Stereo Glasses
    • Headband Magnifiers
    • Illuminated Magnifiers
    • Magnifier with Table Clamp
    • Magnifying Glass
    • Measuring Magnifiers
    • Photo and Film Magnifiers
    • Pocket Magnifiers
    • Pocket Microscope
    • Reticles
    • Surgical Loupes
  • Material Science
    • Compression Mounting Supplies
    • Crucibles
    • Cutting Fluids
    • Epoxy Mount Kits
    • Metallographic Accessories
    • Mounting Clips
    • PELCO Mounting Waxes
    • PELCO Pressure Pot
    • Personel Safety
    • Photonic Cleaning Solutions
    • Plastic & Silicone Molds
    • Polishing & Grinding
      • Colloidal Silica Suspensions
      • Diamond Compounds & Pastes
      • Diamond Suspensions
      • PELCO Lapping Discs
      • Lapping Fixtures
      • Polishing Cloths
      • Polishing Compounds
      • Polishing Powders
      • Silicon Carbide Discs
      • Tripod Polisher
    • Sample Clamp
    • Sectioning
      • Low Speed Diamond Saw
      • Wafering Blades
    • Storage Cabinet
  • Microwave Processing
    • PELCO BioWave Pro+
    • BioWave application Kits
      • Electron Microscopy Kit
      • Immunolabeling Kit
      • Paraffin Tissue Processing Kit
      • Decalcification Kit
    • Microwave Accessoires<
      • Accessories and Replacements
      • Equipment
      • Processing
      • Staining
      • Vacuum
  • Nanotechnology
    • Antibody Gold Conjugates
    • Calibration
      • AFM Calibration
        • (CD) Calibration Test
        • AFM Gold Calibration Kit
        • AFM-SPM calibration
        • AFM, STM, SPM Calibration
        • MRS-3
        • MRS-4
        • MRS-6
      • Microanalysis
        • Pelco Faraday Cup
        • GSR & Particle Analysis
        • NiOx Test Specimen
        • X-Ray References Calibration
      • Performance Testing
        • Back Scattered Electron Test
        • Demonstration Specimens
        • Low & Medium Magnification
      • Resolution Standards
        • AuSome™ Resolution Test
        • Gold on Carbon
        • Low & Medium Magnification
        • Tin on Carbon
      • SEM Calibration
        • 2D Holographic Array
        • Critical Dimension (CD)
        • Critical Dimension Magnification
          • CDMS
          • CDMS-XY
          • CDMS ISO
          • CDMS-XY ISO
          • Etched Si CDMS
          • Etched Si CDMS-XY
          • Etched Si CDMS ISO
          • Etched Si CDMS-XY ISO
        • High Resolution Calibration
        • Line/Grid Standards
    • Coated TEM Grids
      • Carbon
      • Formvar
      • Formvar Carbon
      • Graphene Films
        • Graphene Oxide Films
        • Graphene Support Films
      • Holey Carbon
      • Lacey Carbon
      • Silicon Aperture Frames
      • Substratek Metallic Substrates
    • Gold and Silica Shell Gold Colloid
    • Gold Nanoarrays
    • Negative Stains
    • Substrates
  • Neuroscience
    • Animal Research
      • Animal Identification
      • Small Animal Research
    • Black Plastic Products
    • Blades
    • Brain and Tissue Matrices
      • Acrylic
      • Chrome coated
      • Spinal cord
      • Stainless Steel
      • Tumor Matrices
    • Citifluor Solutions
    • Diamond Microtome Knives
      • AFM
      • Cryo 35 Wet-Dry
      • Cryo 45° Wet – Dry
      • Cryo Immuno
      • Cryotrim
      • Histo
      • Ultra 35°
      • Ultra 45°
      • Ultra Sonic
    • Embedding Cassettes
    • Glass Bottom Dishes
    • Instruments
      • Centrifuges
      • McIlwain Tissue Chopper
      • MicroSlicers
      • PELCO easiSlicer
      • PELCO Rotators
        • R1 Single Speed Rotator
        • R2 Variable Speed Rotator
        • R2 Rotator with Heads with Clips for Test Tubes
      • SliceMasters
      • Sterilizers
      • Stirrers
    • Microscope Slides
      • Microscope Slides Glass
      • Microscope Slides Large
      • Microscope Slides Plastic
      • Microscope Slides Quartz
    • PAP Liquid Blocker Pens
    • PTFE Products
    • Slide Boxes
    • Specimen Holders
    • Staining Jars & Racks
    • Tools for Neuroscience
      • Biopsy Punches
      • Dissection Tools
      • Ear Punches
      • Locking Forceps
      • Needles, Picks & Probes
      • Scalpels
      • Scissors
        • Aesculap
        • High Quality
        • LED Forceps and Scissors
        • Micro Scissors
        • PELCO Scissors
      • Spatulas and Spoons
      • Surgical Bone Cutters
      • Wound Clips
  • Photographic Material
  • Scissors
    • Aesculap
    • General Lab
    • High Quality
    • LED Forceps and Scissors
    • Micro Scissors
    • PELCO Scissors
  • Sectioning
    • Microtome Blades
    • Sapphire Knife
    • Sectioning Supplies
    • Tungsten Carbide Knife
  • SEM Supplies
    • Carbon tabs, tapes & sheets
    • Mount Storage Boxes
    • Planchets
    • Replication Materials
    • Scintillators
    • Specimen Mount Grippers
    • Specimen Preparation Stations
    • Starter Kits
    • Stubs, Mounts and Holders
      • M4 Threaded, Cylinder, and Other Stubs
        • Bulk Specimen Holders, M4
        • Carbon Planchet Holders, M4
        • Carbon, Brass, and Copper Mounts
        • Cross Section Holders
        • Cylinder Specimen Mounts
        • E-Beam Lithography Mount, M4
        • EBSD Pre-tilt Holders & Mounts, M4
        • Filter Holders, M4
        • Flat Sample Clip Holders
        • Hitachi T-base Specimen Holders
        • Metallographic Mount Holders
        • Modular Stage Adapters, M4
        • Mount Adapters, M4
        • Multipurpose Specimen Holder
        • Pin Stub Holders, M4
        • Q Pin Mounts and Holders
        • Rectangular Mounts
        • SEMClamp Holders, M4
        • SEMClip Cylinder Mounts
        • SEMClip Geological
        • STEM Imaging Holder, M4
        • TEM Grid Holder, M4
        • Tilt Specimen Holders
        • Vise Type Holders
        • Wafer & Large Sample Holders
      • Pin Stubs Specimen Mounts and Holders
        • Adapter Buttons
        • Angled Pin Stub Holders
        • Bulk Specimen Holders with Pin
        • Carbon, Brass, and Copper, SEM Mounts
        • E-Beam Lithography Mount
        • EBSD Pre-tilt Holders & Mounts
        • FIB Grid Holders
        • Filter Holders, Pin
        • Jeol Specimen Holders
        • Low Profile FIB Mounts
        • Low Profile SEMClip
        • Metallographic Mount Holders
        • Modular Stage Adapters
        • Mount Adapters
        • Multi Purpose / Bulk Holders
        • Multi-Pin Stub Holders
        • Pin Stub Specimen mounts
        • Planchet Holders
        • Q Pin Stubs and Holders
        • Sample Holder Sets
        • SEMClamp Holders
        • SEMClip Pin Mounts
        • Slotted Pin Stubs
        • STEM Imaging Holder
        • TEM Grid Holders
        • Thin Section Holders
        • Variable Tilt Holders
        • Vise Clamp Holders
        • Wafer Holders with Pin
  • Slides, Coverslips, Storage
    • Microscope Slides Coverslips
    • Microscope Slides Glass
    • Microscope Slides Large
    • Plastic Microscope Slides
    • Microscope Slides Quartz
    • Slide boxes & Trays
  • Sputter Targets
  • Substrates
  • Tabs, Tapes & Sheets
  • TEM Supplies
    • Dissection Supplies
    • Embedding Supplies
      • ACLAR Film
      • Beem Products
        • BEEM Capsules
        • BEEM® Storage
        • Disposable Molds
        • Embedding molds
        • Microcentrifuge Tubes
        • Multi and Flexible Molds
        • Snap-Fit Gelatin Capsules
        • Syringes and Pipettes
      • Eyelashes, Brushes
      • Glass Knives & Accessories
      • Instruments
        • Cryo Chamber
        • Heat Pen
        • PELCO easiGlow
        • PELCO Rotators
          • Single Speed Rotator, R1
          • Variable Speed Rotator, R2
          • Rotator with Heads with Clips for Test Tubes
        • Tissue Processor
      • K-kit for Liquid TEM
      • Loops and Wire
      • Petri Dishes
      • Replication Materials
      • Specimen Holders
      • TEM Checker
      • TEM Grid Boxes
      • Test Specimens
      • Vials and Cube Racks
      • Wheaton Vials
    • Tools
      • Bench Vises
      • Calipers and Micrometers
      • Diamond Scribing Tools
      • Foils
      • Laboratory Lubricants
      • Micro-Tools
        • Measuring Scales
        • Micro Tools - Carbide Tips
        • Micro Tools - Steel Tips
        • Micro Tools - Stainless Steel Tips
        • Technician Sets
      • Needles, Probes & Picks
      • Plastic Pliers
      • Pliers & Side Cutters
      • Screwdrivers and Hex Keys
      • Scribing and Cleaving Kits
      • Workbench Tools
    • Transport & Storage
      • Cabinets for Tissue Cassettes
      • Cardboard, Tin Boxes & Cans
      • Gel-Pak® Substrate Carriers
      • Grid Storage Boxes
      • Compact Modular Cabinet
      • Plastic Jars, Containers & Bottles
      • Membrane Boxes
      • Plastic Storage Boxes
      • Slide Boxes, Trays and Mailers
      • Mount Storage Boxes
      • Wafer Carrier Trays
      • PELCO X-TREME Cases
      • Zipper, Barrier Bags
    • Tweezers
      • Accessories
      • Aesculap® – Forceps
      • Aquarius Tweezers
      • Cantilever Tweezers
      • Carbon Fibre tweezers
      • Dumont™ Tweezers
        • Anti-Capillary
        • Biology
        • Clamping Ring
        • Dumostar
        • Electronic
        • High Precision
        • Manipulating Tweezers
        • Medical
        • Self Closing
        • Titanium
      • General Purpose Forceps
      • Industrial, Economy Tweezers
      • Mount Grippers
      • PELCO Tweezers
        • Biology
        • Ceramic Tips
        • Clean Room Tweezers
        • DLC Coated
        • Economy Tweezers
        • ESD Safe Epoxy Coated
        • ESD Ergonomic
        • Flat and Pad Tips
        • General Purpose
        • Gold Plated
        • High Precision
        • Locking Tweezers
        • Mini
        • PTFE Coated
        • Reverse (self closing)
        • Slim
        • Soft Tips
        • Superalloy, UltraFine Tips
        • Titanium
      • Plastic Tipped ESD Tweezers
      • Plastic Tweezers, Flat & Sharp
      • Plastic, Wafer Tip Styles
      • Surgical Tissue Forceps
      • Wafer Tweezers
      • Wafer, Component, Cover Glass
      • Wire Cutting Tweezers
      • Zirconia Ceramic Tweezers
    • Vacuum Coating
      • Carbon Rods and Wire
      • Evaporation Wire & Pallets
      • Metal Boats
      • Substrates
      • Tungsten Filaments and Coils
      • Tungsten Wire Baskets
    • Vacuum Handling Tools
      • Vacuum Pick-Up Systems
      • Wafer Handling
    • Vacuum Pumps & Supplies
      • Exhaust Filters
      • Vacuum Gauges
      • Vacuum Grease & Sealants
      • Vacuum Pump Oils
      • Vacuum Pumps
        • Diaphragm Vacuum Pump
        • RVP Series Dual Stage Rotary Vane Vacuum Pumps
        • VRI Series Compact
        • VRP Series Heavy Duty
    Critical Dimension (CD)
    Calibration Test Specimens

    for SEM, FIB, and AFM

    Version with a 10-5-2-1-0.5um structure

    This CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch.

    Each pattern has five bars and spaces of equal pitch:10.0um, 5.0µm, 2.0µm, 1.0µm and 0.5µm. The central line area may be used for AFM measurements.

    The patterns are etched into Si with a depth of approximately 200nm. There is no coating on the Si surface.

    Two types are offered:

    • non-certified
    • certified by PTB (Physikalische Technische Bundesanstalt - German counter part of NIST) and individually numbered.

    Based on the measurement of 9 different standards, the accuracy and uniformity are:

    Pattern Size10µm5µm2µm1µm0.5µm
    Accuracy0.20%0.22%0.35%0.56%0.78%
    Uniformity0.27%0.34%0.53%0.80%1.2%
    Loading...
    Product
    Description
    SEM Holders
    Order
    Product

    CD Structure 10-5-2-1-0.5 m, non-certified
    Critical Dimension (CD) Calibration Test Specimens
    no. 618-5 to 618-5R

    Description

    for SEM, FIB, and AFM

    “Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

    Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

    Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m.

    The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm.
    There is no coating on the Si surface.

    Two types are offered:

    • non-certified
    • certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST)

    and individually numbered.

    Based on the measurement of 9 different standards, the accuracy and uniformity are:

    Pattern Size10 m5 m2 m1 m0.5 m
    Accuracy0.20%0.22%0.35%0.56%0.78%
    Uniformity0.27%0.34%0.53%0.80%1.2%
    SEM Holders

    SEM Holders

    TypeProd. No.Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
    A16111pin mount dimPin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    B16261pin mountPin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
    C1622110mm cylinder9.5mm dia. x 9.5mm Cylinder, JEOL
    D1628115mm cylinder15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
    E16291cylinder mount15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
    F16111-9Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
    GYou Supply Mount or Mount of Your Choice, not listed here (contact customer service)
    K16324specimen mount15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    L16327specimen mount25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    M1623112.5mm mount12.2mm dia. x 10mm Cylinder, JEOL
    O1611531.7mm dia. x 6.47mm, Cambridge S4 Mount
    P1624212.7mm mountPin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
    Q1615325 x 10mm cylinder mount25mm dia. x 10mm Cylinder, JEOL
    R1614425.4 x 10mm cylinder mountPin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    Order

    Art.Description Unit PriceQuantity
    618-5

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, unmounted

    Each € 142,70
    ✓
    spinner
    618-5A

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount A

    Each € 159,00
    ✓
    spinner
    618-5B

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount B

    Each € 159,00
    ✓
    spinner
    618-5C

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount C

    Each € 159,00
    ✓
    spinner
    618-5D

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount D

    Each € 159,00
    ✓
    spinner
    618-5E

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount E

    Each € 159,00
    ✓
    spinner
    618-5F

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount F

    Each € 159,00
    ✓
    spinner
    618-5G

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount G, You Supply Mount

    Each p.o.r.
    618-5K

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount K

    Each € 159,00
    ✓
    spinner
    618-5L

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount L

    Each € 159,00
    ✓
    spinner
    618-5M

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount M

    Each € 159,00
    ✓
    spinner
    618-5O

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount O

    Each € 159,00
    ✓
    spinner
    618-5P

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount P

    Each € 159,00
    ✓
    spinner
    618-5Q

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount Q

    Each € 159,00
    ✓
    spinner
    618-5R

    CD Structure 10-5-2-1-0.5 m Specimen, non-certified, Mount R

    Each € 159,00
    ✓
    spinner
    Brand: Ted Pella

    Product
    Description
    SEM Holders
    Order
    Product

    CD Structure 10-5-2-1-0.5 m, certified
    Critical Dimension (CD) Calibration Test Specimens
    no. 618-7 to 618-7R

    Description

    for SEM, FIB, and AFM

    “Critical Dimension (CD) structures” are particularly useful for SEM / FIB magnification calibration and may be used for AFM.

    Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful. The 4.8 x 4.8mm silicon standard has a series of patterns with a side length of 480 m around its edges, helpful for orientation. There are three versions available.

    Version with a 10-5-2-1-0.5um structureThis CD calibration test specimen comprises 5 line patterns, each one clearly identified by its pitch. Each pattern has five bars and spaces of equal pitch:10.0um, 5.0 m, 2.0 m, 1.0 m and 0.5 m.

    The central line area may be used for AFM measurements. The patterns are etched into Si with a depth of approximately 200nm.
    There is no coating on the Si surface.

    Two types are offered:

    • non-certified
    • certified by PTB (Physikalische Technische Bundesanstalt – German counter part of NIST)

    and individually numbered.

    Based on the measurement of 9 different standards, the accuracy and uniformity are:

    Pattern Size10 m5 m2 m1 m0.5 m
    Accuracy0.20%0.22%0.35%0.56%0.78%
    Uniformity0.27%0.34%0.53%0.80%1.2%
    SEM Holders

    SEM Holders

    TypeProd. No.Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
    A16111pin mount dimPin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    B16261pin mountPin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
    C1622110mm cylinder9.5mm dia. x 9.5mm Cylinder, JEOL
    D1628115mm cylinder15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
    E16291cylinder mount15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
    F16111-9Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
    GYou Supply Mount or Mount of Your Choice, not listed here (contact customer service)
    K16324specimen mount15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    L16327specimen mount25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    M1623112.5mm mount12.2mm dia. x 10mm Cylinder, JEOL
    O1611531.7mm dia. x 6.47mm, Cambridge S4 Mount
    P1624212.7mm mountPin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
    Q1615325 x 10mm cylinder mount25mm dia. x 10mm Cylinder, JEOL
    R1614425.4 x 10mm cylinder mountPin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    Order

    Art.Description Unit PriceQuantity
    618-7

    CD Structure 10-5-2-1-0.5 m Specimen, unmounted

    Each € 2.007,40
    ✓
    spinner
    618-7A

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount A

    Each € 1.826,00
    ✓
    spinner
    618-7B

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount B

    Each € 1.826,00
    ✓
    spinner
    618-7C

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount C

    Each € 1.826,00
    ✓
    spinner
    618-7D

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount D

    Each € 1.826,00
    ✓
    spinner
    618-7E

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount E

    Each € 1.826,00
    ✓
    spinner
    618-7F

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount F

    Each € 1.826,00
    ✓
    spinner
    618-7G

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount G, You Supply Mount

    Each p.o.r.
    618-7K

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount K

    Each € 1.826,00
    ✓
    spinner
    618-7L

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount L

    Each € 1.826,00
    ✓
    spinner
    618-7M

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount M

    Each € 1.826,00
    ✓
    spinner
    618-7O

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount O

    Each € 1.826,00
    ✓
    spinner
    618-7P

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount P

    Each € 1.826,00
    ✓
    spinner
    618-7Q

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount Q

    Each € 1.826,00
    ✓
    spinner
    618-7R

    CD Structure 10-5-2-1-0.5 m Specimen, Certified, Mount R

    Each € 1.826,00
    ✓
    spinner
    Brand: Ted Pella

    Product
    Description
    SEM Holders
    Order
    Product

    CD Structure 500-200-100nm, non-certified
    Critical Dimension (CD) Calibration Test Specimens
    no. 618-4 to 618-4R

    Description

    (overview with location bars)
    Version with a 500-200-100nm structure

    (structure)

    This advanced CD calibration test specimen is suited for calibrating smaller structures. The 500-200-100nm test specimen comprises 3 line patterns, each identified by its pitch.

    Each pattern has 5 bars and spaces with equal pitch: 500nm, 200nm and 100nm. The central area may be used for AFM measurements.

    The patterns are etched into Si with a depth of approx. 45-50nm. There is no coating on the Si surface.
    On some CD calibration targets one of the 100nm lines can be missing. This is a normal occurrence and does not influence performance of the specimen.

     

    Pattern Size500nm200nm100nm
    Accuracy0.30%0.55%0.50%
    Uniformity0.24%0.60%1.20%

     

    SEM Holders

    SEM Holders

    TypeProd. No.Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
    A16111pin mount dimPin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    B16261pin mountPin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
    C1622110mm cylinder9.5mm dia. x 9.5mm Cylinder, JEOL
    D1628115mm cylinder15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
    E16291cylinder mount15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
    F16111-9Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
    GYou Supply Mount or Mount of Your Choice, not listed here (contact customer service)
    K16324specimen mount15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    L16327specimen mount25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
    M1623112.5mm mount12.2mm dia. x 10mm Cylinder, JEOL
    O1611531.7mm dia. x 6.47mm, Cambridge S4 Mount
    P1624212.7mm mountPin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
    Q1615325 x 10mm cylinder mount25mm dia. x 10mm Cylinder, JEOL
    R1614425.4 x 10mm cylinder mountPin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
    Order

    Art.Description Unit PriceQuantity
    618-4

    CD Structure 500-200-100nm Specimen, non-certified, unmounted

    Each € 866,10
    ✓
    spinner
    618-4A

    CD Structure 500-200-100nm Specimen, non-certified, Mount A

    Each € 868,90
    ✓
    spinner
    618-4B

    CD Structure 500-200-100nm Specimen, non-certified, Mount B

    Each € 868,90
    ✓
    spinner
    618-4C

    CD Structure 500-200-100nm Specimen, non-certified, Mount C

    Each € 868,90
    ✓
    spinner
    618-4D

    CD Structure 500-200-100nm Specimen, non-certified, Mount D

    Each € 868,90
    ✓
    spinner
    618-4E

    CD Structure 500-200-100nm Specimen, non-certified, Mount E

    Each € 868,90
    ✓
    spinner
    618-4F

    CD Structure 500-200-100nm Specimen, non-certified, Mount F

    Each € 868,90
    ✓
    spinner
    618-4G

    CD Structure 500-200-100nm Specimen, non-certified, Mount G, You Supply Mount

    Each p.o.r.
    618-4K

    CD Structure 500-200-100nm Specimen, non-certified, Mount K

    Each € 868,90
    ✓
    spinner
    618-4L

    CD Structure 500-200-100nm Specimen, non-certified, Mount L

    Each € 868,90
    ✓
    spinner
    618-4M

    CD Structure 500-200-100nm Specimen, non-certified, Mount M

    Each € 868,90
    ✓
    spinner
    618-4O

    CD Structure 500-200-100nm Specimen, non-certified, Mount O

    Each € 868,90
    ✓
    spinner
    618-4P

    CD Structure 500-200-100nm Specimen, non-certified, Mount P

    Each € 868,90
    ✓
    spinner
    618-4Q

    CD Structure 500-200-100nm Specimen, non-certified, Mount Q

    Each € 868,90
    ✓
    spinner
    618-4R

    CD Structure 500-200-100nm Specimen, non-certified, Mount R

    Each € 868,90
    ✓
    spinner
    Brand: Ted Pella

    Contact

    Van Loenen Instruments
    Penningweg 69 E
    1507 DE Zaandam

    Tel :+31 75 614 90 40
    E-mail  :info@loeneninstruments.com

    BTW/VAT nr. :NL804 608 180 B01
    KvK nr. :28038099

    Sign up for our News Letter

    Our partners

    © 2025 Van Loenen Instruments