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Home / Accessories for Microscopy / AFM-SPM / Substrates / Ultra-Flat Thermal SiO2 Substrates
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Ultra-Flat Thermal SiO2 Substrates
The Ultra-Flat SiO2 substrates consist of a 200nm thermally grown amorphous SiO2 film on an ultra-flat silicon wafer.
no. 21620-6 to 21620-510

Description
Ultra-Flat Thermal SiO2 Substrates

The Ultra-Flat SiO2 substrates consist of a 200nm thermally grown amorphous SiO2 film on an ultra-flat silicon wafer.SiO2 is one of the most characterized materials and is widely used in semiconductor manufacturing, thin film research and as substrate for growing cells.It can be directly used as substrate for AFM and SEM imaging.The ultra-flat thermal silicon dioxide substrates are available in 6″ wafer and conveniently diced 5 x 5mm, 5 x 7mm and 10 x 10mm chips.The 6″ wafer is shipped in a 6″ wafer carrier, the diced pieces are shipped in a Gel-Pak box.The special clean dicing process involves coating the wafer with photo resist before dicing and removing it after dicing which produces debris-free SiO2 substratres.All products are packed in class 10 clean room conditions.Properties for thermal SiO2 substrates:

  • Material: CZ Virgin Silicon Wafer
  • Grade: Prime
  • Diameter: 150mm
  • Orientation: <100>
  • Type/Dopant: P/Boron
  • Resistivity: 10-20 Ohm-cm
  • Thickness: 675 +/- 25µm
  • TTV: ≤2µm
  • Site Flatness: ≤1µm
  • Warp: ≤30µm
  • Bow: ≤20µm
  • Particles: ≤20@≥0.2µm
  • Front Surface: Polished
  • Back Surface: Etched
  • Flat: 1 per SEMI Standard
  • 2000A +/- 5% Thermal Oxide
Ultra-Flat Thermal 6″ SiO2 Wafer
5 x 5mm Diced Ultra-flat Thermal SiO2 Substrates

 

Order

Art.Description Unit PriceQuantity
21620-6

200nm Thermal Oxide on 6″ Ultra-Flat Wafer, Type , in 6″ wafer carrier

Each € 276,00
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21620-55

200nm Thermal Oxide on 5x5mm diced Ultra-Flat Wafer, Type , in Gel-Pak box

25 € 217,40
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spinner
21620-57

200nm Thermal Oxide on 5x7mm diced Ultra-Flat Wafer, Type , in Gel-Pak box

18 € 234,70
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spinner
21620-510

200nm Thermal Oxide on 10x10mm diced Ultra-Flat Wafer, Type , in Gel-Pak box

6 € 217,40
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spinner
Brand: Ted Pella

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