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Home / Accessories for Microscopy / AFM-SPM / Substrates / Ultra-Flat 6″ Silicon Wafers
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Ultra-Flat 6″ Silicon Wafers
Ultra-Flat 6" diameter Silicon Wafer for demanding substrate studies.
no. 21610-6 to 21610-510

Description

Ultra-Flat 6″ Silicon Wafers

Ultra-Flat 6″ diameter Silicon Wafer for demanding substrate studies. The 6″ ultra-flat silicon wafer is shipped in a 6″ Wafer Carrier.

Also available as 5 x 5mm, 5 x 7mm, 10 x10mm stealth-diced dies in Gel-Pak® boxes. Stealth dicing eliminates edge-chipping and cutting debris associated with saw dicing, providing the cleanest, most uniform product possible.

All products are packed in class 10 clean room conditions.

Properties for 6″ (150mm) Ultra-Flat Wafer:

  • Material: CZ Virgin Silicon Wafer
  • Grade: Prime
  • Diameter: 150mm
  • Orientation: <100>
  • Type/Dopant: P/Boron
  • Resistivity: 10-20 ohm-cm
  • Thickness: 675µm +/- 20µm
  • TTV: ≤2µm
  • Site Flatness: <=1µm
  • Warp: ≤30µm
  • Bow: ≤20µm
  • Particles: ≤30@≥0.2µm
  • Front Surface: Polished
  • Back Surface: Etched
  • Flat: 1 per SEMI Standard
Order

Art.Description Unit PriceQuantity
21610-6

6″ Ultra-Flat Silicon Wafer, Type <100>

Each € 153,20
✓
spinner
21610-55

5 x 5mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak box

25 € 195,70
✓
spinner
21610-57

5 x 7mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak box

18 € 195,70
✓
spinner
21610-510

10 x 10mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak box

6 € 195,70
✓
spinner
Brand: Ted Pella

Contact

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1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

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