2D Holographic Array Standards
| Period: | 144nm pitch, two-dimensional array. Accurate to 1nm. Refer to calibration certificate for actual pitch.Surface:Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. |
| Usability: | The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas altered or contaminated by previous scans. |
| AFM: | Use in contact, intermittent contact (TappingMode ) and other modes with image sizes from 250nm to 10 m. Available unmounted or mounted on 12mm steel disks. |
| SEM: | This specimen works well at all accelerating voltages. Normally supplied unmounted. Can be mounted on a stub of your choice of SEM Mount |
| Model 2D: | This Calibration Reference specimen comes with a non-traceable, manufacturer s certificate. This states the average period, based on batch measurements. |
| Model 2DUTC: | This Traceable, Certified Standard is a select grade. Each standard is individually measured in comparison with a similar specimen calibrated at PTB. (PTB, Physikalisch-Technischen Bundesanstalt, is the German counterpart of NIST.) The uncertainty of single pitch values is typically 1.4nm (95% confidence interval). Multi-pitch measurements provide the usual square-root of N improvement in precision. |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  |
Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  |
9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  |
15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  |
15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | |
Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  |
15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  |
25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  |
12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  |
31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  |
Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  |
25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  |
Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 16465-2D | 144nm 2D Pattern Calibration Standard, unmounted |
Each | € 1.810,20 | ||
| 16465-2D-A | 144nm 2D Pattern Calibration Standard on Mount A |
Each | € 1.999,70 | ||
| 16465-2D-B | 144nm 2D Pattern Calibration Standard on Mount B |
Each | € 0,00 | ||
| 16465-2D-C | 144nm 2D Pattern Calibration Standard on Mount C |
Each | € 0,00 | ||
| 16465-2D-D | 144nm 2D Pattern Calibration Standard on Mount D |
Each | € 1.999,70 | ||
| 16465-2D-E | 144nm 2D Pattern Calibration Standard on Mount E |
Each | € 1.999,70 | ||
| 16465-2D-F | 144nm 2D Pattern Calibration Standard on Mount F |
Each | € 1.796,40 | ||
| 16465-2D-G | 144nm 2D Pattern Calibration Standard on Mount G, you supply mount |
Each | € 1.999,70 | ||
| 16465-2D-K | 144nm 2D Pattern Calibration Standard on Mount K |
Each | € 1.999,70 | ||
| 16465-2D-L | 144nm 2D Pattern Calibration Standard on Mount L |
Each | € 1.999,70 | ||
| 16465-2D-M | 144nm 2D Pattern Calibration Standard on Mount M |
Each | € 2.586,30 | ||
| 16465-2D-O | 144nm 2D Pattern Calibration Standard on Mount O |
Each | € 2.586,30 | ||
| 16465-2D-P | 144nm 2D Pattern Calibration Standard on Mount P |
Each | € 2.586,30 | ||
| 16465-2D-Q | 144nm 2D Pattern Calibration Standard on Mount Q |
Each | € 2.586,30 | ||
| 16465-2D-R | 144nm 2D Pattern Calibration Standard on Mount R |
Each | € 1.796,40 | ||
| 16465-2D-AFM | 144nm 2D Pattern Calibration Standard on 12mm steel disc |
Each | € 1.999,70 |