Planotec Silicon Calibration Specimen – 10 m Pitch
Useful for magnification calibration or image distortion check in SEM and LM.
Single crystal silicon, 5mm x 5mm.
The squares repeat every 10 m (0.01mm).
The dividing lines are about 1.9 m wide, formed by electron beam lithography.
A broader marking line is written every 500 m (0.5mm) which is useful for light microscopy.
Lines are etched, and approximately 300nm deep.
Available unmounted or mounted on SEM specimen mounts.
A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost.
Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained in the image.
To avoid contamination of test and calibration samples, we recommend storing these under vacuum.
 | Download Sample Certification for Planotec Test Specimen |
| Type | Prod. No. | Data (D=Head dia.; P=Pin dia.; PL=Pin (length) | |
|---|---|---|---|
| A | 16111 |  | Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| B | 16261 |  | Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY |
| C | 16221 |  | 9.5mm dia. x 9.5mm Cylinder, JEOL |
| D | 16281 |  | 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON |
| E | 16291 |  | 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON |
| F | 16111-9 | | Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS |
| G | You Supply Mount or Mount of Your Choice, not listed here (contact customer service) | ||
| K | 16324 |  | 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| L | 16327 |  | 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight |
| M | 16231 |  | 12.2mm dia. x 10mm Cylinder, JEOL |
| O | 16115 |  | 31.7mm dia. x 6.47mm, Cambridge S4 Mount |
| P | 16242 |  | Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head |
| Q | 16153 |  | 25mm dia. x 10mm Cylinder, JEOL |
| R | 16144 |  | Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom |
| Art. | Description | Unit | Price | Quantity | |
|---|---|---|---|---|---|
| 660-615-A | Planotec Silicon Test Specimen, Certified, Mount A | Each | € 1.086,60 | ||
| 660-615-B | Planotec SiliconTest Specimen, Certified, Mount B | Each | € 1.024,80 | ||
| 660-615-C | Planotec Silicon Test Specimen, Certified, Mount C | Each | € 1.024,80 | ||
| 660-615-D | Planotec Silicon Test Specimen, Certified, Mount D | Each | € 2.212,30 | ||
| 660-615-E | Planotec Silicon Test Specimen, Certified, Mount E | Each | € 1.024,80 | ||
| 660-615-F | Planotec Silicon Test Specimen, Certified, Mount F | Each | € 952,30 | ||
| 660-615-G | Planotec Silicon Test Specimen, Certified, Mount G, you supply mount | Each | € 1.155,70 | ||
| 660-615-K | Planotec Silicon Test Specimen, Certified, Mount K | Each | € 1.004,30 | ||
| 660-615-L | Planotec Silicon Test Specimen, Certified, Mount L | Each | € 1.684,50 | ||
| 660-615-M | Planotec Silicon Test Specimen, Certified, Mount M | Each | € 1.031,00 | ||
| 660-615-O | Planotec Silicon Test Specimen, Certified, Mount O | Each | € 1.031,00 | ||
| 660-615-P | Planotec Silicon Test Specimen, Certified, Mount P | Each | € 1.031,00 | ||
| 660-615-Q | Planotec Silicon Test Specimen, Certified, Mount Q | Each | € 986,60 | ||
| 660-615-R | Planotec Silicon Test Specimen, Certified, Mount R | Each | € 1.031,00 | ||
| 660-615-5 | Planotec Test Specimen for incident light microscopy, Certified, Mounted on a blackened glass slide | Each | € 1.105,10 |