Pelcotec G-1 Silicon Calibration Specimen – 1 µm Pitch

Includes 1 m, 10 µm and 100 µm pitch

The Pelcotec G-1 calibration specimen with a 1 m pitch grid is very useful for magnification calibration or image distortion check in the 100x to 10,000x magnification range.
Can be used for SEM, Auger, Sims, FIB, and LM (reflected light).
Specimen may also be mounted directly on the Pelcotec G-1 which will give an accurate internal calibration in the image.

Particularly useful when working with powders.
Possible alternative for the SIRA calbration specimen (0.462 µm pitch) which is no longer available.

The Pelcotec G-1 has the following specifications:

• Total calibration area is 3x3mm with a 1 µm pitch grid
• Lines at 10um and 100um are thicker for easy orientation
• Includes 1 µm, 10 µm and 100 µm pitch
• 300nm +/- 30nm deep line etched in ultraflat Si
• Line width is 200nm at 1 m, 300nm at 10 m and 400nm at 100 m pitch lines
• Precision is 1 m +/- 0.025 m with a perpendicularity better than 0.01
• Serial number etched on each Pelcotec G-1 calibration standard
• NIST traceable version is Pelcotec G-1T
• Individually fully certified version is Pelcotec G-1C
• Si die size is 4x4mm with a thickness of 525 m +/-20 m, <100> orientation
• Boron doped silicon wafer with a resistivity of 5-10 Ohm/cm
• Available unmounted or mounted on SEM specimen mounts

To avoid contamination of test and calibration samples, we recommend storing these under vacuum.

SEM Image Shows 1 m Pitch	10 m Pitch Lines	1 m Pitch Lines

Download 633-11 Sample Certificate of Calibration

SEM Holders

Type	Prod. No.		Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A	16111		Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B	16261		Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C	16221		9.5mm dia. x 9.5mm Cylinder, JEOL
D	16281		15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E	16291		15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F	16111-9		Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G			You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K	16324		15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L	16327		25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M	16231		12.2mm dia. x 10mm Cylinder, JEOL
O	16115		31.7mm dia. x 6.47mm, Cambridge S4 Mount
P	16242		Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q	16153		25mm dia. x 10mm Cylinder, JEOL
R	16144		Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom