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Product

292nm SEM, Auger and FIB Reference Standard, Certified, Traceable
no. 643-11 to 643-11R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period:292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure:Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability:The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM:Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB:Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification:There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
SEM Holders

SEM Holders

TypeProd. No.Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A16111pin mount dimPin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B16261pin mountPin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C1622110mm cylinder9.5mm dia. x 9.5mm Cylinder, JEOL
D1628115mm cylinder15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E16291cylinder mount15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F16111-9Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
GYou Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K16324specimen mount15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L16327specimen mount25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M1623112.5mm mount12.2mm dia. x 10mm Cylinder, JEOL
O1611531.7mm dia. x 6.47mm, Cambridge S4 Mount
P1624212.7mm mountPin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q1615325 x 10mm cylinder mount25mm dia. x 10mm Cylinder, JEOL
R1614425.4 x 10mm cylinder mountPin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
643-11

292nm High Resolution AFM Reference Standard, Traceable, Unmounted

 Each € 6.669,50
✓
643-11A

292nm High Resolution AFM Reference Standard, Traceable, Mount A

 Each € 8.268,00
✓
643-11B

292nm High Resolution AFM Reference Standard, Traceable, Mount B

 Each € 9.380,20
✓
643-11C

292nm High Resolution AFM Reference Standard, Traceable, Mount C

 Each € 7.301,20
✓
643-11D

292nm High Resolution AFM Reference Standard, Traceable, Mount D

 Each € 9.270,20
✓
643-11E

292nm High Resolution AFM Reference Standard, Traceable, Mount E

 Each € 8.838,10
✓
643-11F

292nm High Resolution AFM Reference Standard, Traceable, Mount F

 Each € 6.620,30
✓
643-11G

292nm High Resolution AFM Reference Standard, Traceable, Mount G, you supply mount

 Each € 6.440,00
✓
643-11K

292nm High Resolution AFM Reference Standard, Traceable, Mount K

 Each € 6.440,00
✓
643-11L

292nm High Resolution AFM Reference Standard, Traceable, Mount L

 Each € 9.379,90
✓
643-11M

292nm High Resolution AFM Reference Standard, Traceable, Mount M

 Each € 7.799,70
✓
643-11O

292nm High Resolution AFM Reference Standard, Traceable, Mount O

 Each € 8.268,00
✓
643-11P

292nm High Resolution AFM Reference Standard, Traceable, Mount P

 Each € 8.268,00
✓
643-11Q

292nm High Resolution AFM Reference Standard, Traceable, Mount Q

 Each € 6.100,80
✓
643-11R

292nm High Resolution AFM Reference Standard, Traceable, Mount R

 Each € 6.100,80
✓
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