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Product
292nm SEM, Auger and FIB Reference Standard, Certified, Traceable
no. 643-11 to 643-11R

Description

292nm Pitch High Magnification, High Resolution

Precision holographic grating standard with high contrast and excellent edge definition

Period: 292nm pitch nominal, one dimensional array. Accuracy is +/- 1%. Calibration certificate will give the actual pitch of the standard.
Surface structure: Titanium lines on Silicon, 4x3mm dimensions. Line height (about 30nm) and line width (130nm) are not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make tens of thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20um. Mounted on a 12mm steel AFM disk.
SEM, Auger, FIB: Can be used for a wide range of accelerating voltage (<1kV-30kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice.
Certification: There is a version with a non-traceable manufacturer’s certificate stating average pitch, based on batch measurements
SEM Holders

SEM Holders

Type Prod. No. Data (D=Head dia.; P=Pin dia.; PL=Pin (length)
A 16111 pin mount dim Pin Mount: D=12.7mm; P=3.2mm; PL= 7.9mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
B 16261 pin mount Pin Mount: D=12.7mm; P=3.2mm; PL=14.3mm, AMRAY
C 16221 10mm cylinder 9.5mm dia. x 9.5mm Cylinder, JEOL
D 16281 15mm cylinder 15mm dia. x 15mm Cylinder, JEOL, ISI/ABT/TOPCON
E 16291 cylinder mount 15mm dia. x 10mm Cylinder, JEOL, ISI/ABT/TOPCON
F 16111-9 Pin Mount: 12.7mm x 3.2mm pin. PL=6mm, ZEISS/LEO SEMS FESEMs/FIBS
G You Supply Mount or Mount of Your Choice, not listed here (contact customer service)
K 16324 specimen mount 15mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
L 16327 specimen mount 25mm dia. x 6mm Cylinder, M4 Hitachi, Agilent / Keysight
M 16231 12.5mm mount 12.2mm dia. x 10mm Cylinder, JEOL
O 16115 31.7mm dia. x 6.47mm, Cambridge S4 Mount
P 16242 12.7mm mount Pin Mount: 12.7mm dia. x 15.7mm height, AMRAY special slotted head
Q 16153 25 x 10mm cylinder mount 25mm dia. x 10mm Cylinder, JEOL
R 16144 25.4 x 10mm cylinder mount Pin mount: D=25.4mm; pin=3.2mm, FEI/Philips, Cambridge, Leica, TESCAN, CAMSCAN, ASPEX, Phenom
Order

Art.Description Unit PriceQuantity
643-11

292nm High Resolution AFM Reference Standard, Traceable, Unmounted

 Each € 6.669,50
✓
643-11A

292nm High Resolution AFM Reference Standard, Traceable, Mount A

 Each € 8.268,00
✓
643-11B

292nm High Resolution AFM Reference Standard, Traceable, Mount B

 Each € 9.380,20
✓
643-11C

292nm High Resolution AFM Reference Standard, Traceable, Mount C

 Each € 7.301,20
✓
643-11D

292nm High Resolution AFM Reference Standard, Traceable, Mount D

 Each € 9.270,20
✓
643-11E

292nm High Resolution AFM Reference Standard, Traceable, Mount E

 Each € 8.838,10
✓
643-11F

292nm High Resolution AFM Reference Standard, Traceable, Mount F

 Each € 6.620,30
✓
643-11G

292nm High Resolution AFM Reference Standard, Traceable, Mount G, you supply mount

 Each € 6.440,00
✓
643-11K

292nm High Resolution AFM Reference Standard, Traceable, Mount K

 Each € 6.440,00
✓
643-11L

292nm High Resolution AFM Reference Standard, Traceable, Mount L

 Each € 9.379,90
✓
643-11M

292nm High Resolution AFM Reference Standard, Traceable, Mount M

 Each € 7.799,70
✓
643-11O

292nm High Resolution AFM Reference Standard, Traceable, Mount O

 Each € 8.268,00
✓
643-11P

292nm High Resolution AFM Reference Standard, Traceable, Mount P

 Each € 8.268,00
✓
643-11Q

292nm High Resolution AFM Reference Standard, Traceable, Mount Q

 Each € 6.100,80
✓
643-11R

292nm High Resolution AFM Reference Standard, Traceable, Mount R

 Each € 6.100,80
✓
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