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Home / Instruments / PELCO Dimpler

PELCO Dimpler

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PELCO Dimpler

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Precision polishing system for TEM specimen thinning and site-specific analysis

The PELCO® Dimpler™ is the latest model in the evolution of the Dimpler line formerly available from South Bay Technology and provides Automated Precision Thinning of Specimens for TEM Analysis, for deprocessing and failure analysis, and similar applications where targeted fine polishing is required.

It is a precision electro-mechanical metallographic lapping in­strument that will continuously monitor and control dimpling parameters and accurately terminate at a preset specimen thickness.

This electronic and mechanical integration has added repeatability and reliability to the dimpling process, as well as automation.

Active monitoring of the Z-position, feedback-controlled damping, and automated controls for determining termination of processing work together to provide repeatable, reliable results in sample preparation.

Z Position

The Z position is continuously monitored via a non-contact sensor. The digital display indicates the dimple depth in microns, and is updated once every revolution
This negates any errosr due to tool run out, especially significant when using padded polishing tools. The termination depth can be set using the Z-position, allowing processing to stop when a specified depth of material is removed.

Termination

Process termination can be determined using the built-in timer, or by the Z Position. When using Z Position termination, the timer counts up to measure the total time elapsed until the Z Position is reached.

This is useful for creating process recipies for various sampel types. Four factors improve the overall stability during processing, and the termination accuracy:

  • Non-Contact Position Sensor
  • Tool Phase Sensor
  • No external measuring device
  • Magnetically coupled arm damping

The Non-Contact Position Sensor measures the location of the fulcrum arm which corresponds precisely to the thickness of the specimen.
This sensor has an accuracy of better than one micron. Since it is non-contacting there are no detrimental effects on the action of the fulcrum arm.

The reaction time of the sensor is fast enough to terminate the dimpling process the first time the Tool Phase Sensor indicates that the Z termination set point has been reached. Specimen thickness is measured directly on the PELCO® Dimpler™ with the tool surface as the measuring point.

The dimple depth and the Z termination set point are measured with the same reference. This prevents any measurement error from being translated directly to a termination error.

Damping

Damping of the arm is accomplished by using position information from the Non-Contact Position Sensor, processing it and feeding it back to the arm motor, which controls the up/down force of the arm.

The position sensor and the processing circuit is fast enough to actively dampen any vibration the arm may experience.
Since the damping force is magnetically coupled to the arm there is no mechanical play in the system, allowing damping response on the sub-micrometer level. Damping is adjustable from zero damping to stiff damping.

Damping offers three significant attributes:

  • Vibrations that can crack thin specimens are greatly reduced.
  • Keeps tools round, negating excess impacts, providing more accurate Z position control.
  • Tool gently contacts the specimen when the arm is lowered.

Automated Controls

Automated features make the dimpling process more repeatable and easy to use.  Tools are raised and lowered at the touch of a button; dimpling force, damping force, fine balance, and Z offset (termination point) all are set from the front panel.

Once dimpling has begun no monitoring is necessary. After the initial specimen thickness has been measured, the specimen is mounted and the user simply selects a dimple depth and begins dimpling.

The precise Z position of the tool/surface interface is continuously displayed while dimpling with any tool. When the selected dimple depth is reached the PELCO® Dimpler™ controls will automatically raise the arm then stop the tool rotation, specimen rotation, and clock timer.

Working Interface

The working interface for the unpadded tools shows very high stability in terms of the ΔZ reading (change in the offset value), with any deviation usually the result of tilt in the mounted sample.

Research has indicated that for padded tools, the working diameter is within the nap of the pad. In this case, the ΔZ between the working interface and the specimen is a function of dimpling load (force setpoint), tool speed, damping, and pad compliance.

After the dimpling load, tool speed, and damping are selected, the working diameter will stabilize at the working interface of the pad. This working interface is monitored on the Z display and used as a reference location from which a specimen is to be dimpled further.

Specimen Mounting

Different mounts are available depending on the size and type of sample. TEM specimens are generally mounted on optically smooth sapphire flats. The low thermal mass of the flat reduces mounting and dismounting times and the smooth surface allows the dimpled specimens to be easily removed.

The hardness of sapphire limits damage if specimens are accidentally perforated due to operator error. The retainer ring which secures the sapphire flat also serves as a slurry reservoir. This platen set is used with the traditional Dimpler tools.

For larger specmens for surface analysis or delayering a separate, shorter magnetic base and platen set is used with larger diameter tools. These were developed for delayering and deprocessing.

Tools

The standard dimpling tools include flatting and dimpling tools, in both unpadded versions for faster material removal and padded versions for polishing.

Tools are made from 316 Stainless steel. Flatting tools such as Tools li and 2i, and the Large Area Tools have a flat profile while Dimpling Tools such as 3i and 4i have a radiused profile to produce a pronounced dimple.

The flatting tools will still produce a dimple with the lowest point at the center of rotation, but it will have a much shallower height differential across the dimple.

A variety of padded and unpadded tools are available to meet many dimple polishing process requirements.

The 83031 standard tool set for 3mm samples contains 6 tools, part numbers 83010, 83016, 83015, 83012, 83013, and 83014. Available tools and specimen mounts are shown below.

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Specifications
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Product

PELCO Dimpler
Precision polishing system for TEM specimen thinning and site-specific analysis
no. 84000

Specifications

Specifications

PELCO® Dimpler™ & Tools Specifications

Z Offset Accuracy: 1 micron
Range: 2000 microns
Z Termination Accuracy Tools 1i / 3i: <± 1 micron
Tools 2i / 4i: <± 2 microns
Tool Force Range: 1 – 200 grams
1 gram steps
Balance Sensitivity: 1 gram
Range: 50 grams
Tool Speed 100 – 600 RPM
Specimen Platen Speed 10 RPM
Tool Shaft 0.5 micron TIR
Tools 1i / 3i: <± 1 micron TIR
Tools 2i / 4i: <± 2 microns TIR
Platen Surface < 0.5 micron TIR
Dimensions Length: 68.6cm
Width: 35.6cm
Height: 33cm
Weight: 32kg
Electrical Universal AC Input:100-240VAC, 50/60Hz
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Art.Description Unit PriceQuantity
84000

PELCO Dimpler precision specimen thinning for TEM

Each p.o.r.
Brand: Ted Pella

Product
Description
Specifications
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Video Alignment Microscope
A Fully Digital Alignment and Spotting Microscope
no. 83050

Description
The PELCO Video Alignment Microscope (VAM) is designed for easy alignment and inspection of of samples. It was originally designed with, and is an essential accessory for the PELCO Dimpler, particularly for deprocessing/delayering and site-specific polishing applications.

It allows for easy targeting of an area of interest, as well as precise control of the position, size, and shape of the bottom of the dimple or thinned area of the specimen.The VAM has a magnification of 100X or 200X (digital), with a bright TFT display. This unit includes a number of improvements over the Video Alignment Miscroscope offered by South Bay Technology, particularly with regards to ease of use.

These include: much improved platen holding and sample motion; an upgraded display; and a high quality cross-hair in the optical path, rather than screen-mounted.

The sample stage consists of a hexagonal post with a center alignment mark that uses the same sample mounts as the PELCO Dimpler. A crosshair allows for precise alignment of the area of interest. If using with the PELCO Dimpler, this also corresponds to the center of rotation of the base while dimpling.

The PELCO Video Alignment Microscope may also be used as an inspection scope for any type of sample preparation, for example with our Lapping Fixtures and other instruments. It is an essential tool for monitoring progress during all kinds of sample preparation.

The large, convenient display is easy to read and ergonomic in comparision to a traditional magnifier or optical microscope. Epi-illumination through the objective lens ensures excellent viewing contrast, an important factor when using optical fringes to monitor sample thickness.

Features

  • Improved platen gripping allows for precise positioning of the sample with the X-Y micrometer stage
  • Precision X-Y stage motion for sample alignment
  • Epi-illumination through the objective lens gives excellent contrast
  • Precision optical cross-hair
  • Switchable digital magnification (100X – 200X)

Sample Mount Pedestal
without Platen Set

Large Area Platen with Sample
in the Platen Positioner

Specifications

Specifications

Length 275mm (10.8″)
Width 200mm (7.9″)
Height 457mm (18″)
Weight 12kg (26.5lb)
Electrical Universal AC input: 100-240 VAC, 15/10 A, 50/60 Hz
Magnification 100X or 200X (digital, switchable)
Platen Diameter 1″ (25 mm)
Max Sample Movement +/- 5mm
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Art.Description Unit PriceQuantity
83050

PELCO Video Alignment Microscope

Each € 7.384,20
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Brand: Ted Pella

Accessories

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Kit for Large Samples
Typical range in thickness for dimpled samples is 100 microns to 760 microns.
no. 83070

Description

The typical range in thickness for dimpled samples is 100 microns to 760 microns. The sensor sensitivity range is at maximum 2mm, which has generally limited operation to a small range of sample thickness. This kit provides a set of shims and a larger diameter tool that allows both taller and wider samples to be dimple polished. It greatly extends the utility for delayering larger semiconductor samples, and for other selective area polishing applications. The kit extends the maximum sample size to ~0.5″ (12mm) in height and up to 3″ (75mm) in diameter. It can be used with any of the PELCO® Dimpler™ tool or platen sets, and is fully backwards compatible with all PELCO® and South Bay Technology D500i Dimplers.

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Art.Description Unit PriceQuantity
83070

PELCO® Dimpler™ Kit for Large Samples

Each € 945,20
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Brand: Ted Pella

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Standard Tool Set for 3mm Samples
no. 83031

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Art.Description Unit PriceQuantity
83031

Standard Tool Set for 3mm Samples

Each € 501,20
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Brand: Ted Pella

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Standard Platen Set (with through-hole)
no. 83027

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Art.Description Unit PriceQuantity
83027

Standard Platen Set (with through-hole)

Each € 762,40
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Brand: Ted Pella

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Adjustable Platen Set
no. 83032

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Art.Description Unit PriceQuantity
83032

Adjustable Platen Set

Each € 653,90
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Brand: Ted Pella

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Standard Platen (with through-hole)
no. 83002

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Art.Description Unit PriceQuantity
83002

Standard Platen (with through-hole)

Each € 208,00
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Brand: Ted Pella

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Adjustable Platen, Fits PELCO 15000 Lapping Fixture
no. 83004-1

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Art.Description Unit PriceQuantity
83004

Adjustable Platen, Fits PELCO 15000 Lapping Fixture

Each € 179,30
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Brand: Ted Pella

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Magnetic Base for Large Area Tool
no. 83007

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Art.Description Unit PriceQuantity
83007

Magnetic Base for Large Area Tool

Each € 322,70
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Slurry Retainer Ring for Standard and Adjustable Platens
no. 83003

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Art.Description Unit PriceQuantity
83003

Slurry Retainer Ring for Standard and Adjustable Platens

Each € 167,70
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Brand: Ted Pella

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Sapphire Flat
no. 83001

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Art.Description Unit PriceQuantity
83001

Sapphire Flat

Each € 114,30
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Platen for Large Area Tools
no. 83040

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Art.Description Unit PriceQuantity
83040

Platen for Large Area Tools

Each € 106,70
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Magnetic Base for Standard and Adjustable Platen
no. 83008

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Art.Description Unit PriceQuantity
83008

Magnetic Base for Standard and Adjustable Platen

Each € 322,70
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Brand: Ted Pella

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Tool li, Flatting
no. 83010

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Art.Description Unit PriceQuantity
83010

Tool li, Flatting

Each € 91,50
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Tool 4iM, Dimpling, Padded (low nap rayon)
no. 83015

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Art.Description Unit PriceQuantity
83015

Tool 4iM, Dimpling, Padded (low nap rayon)

Each € 106,70
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Brand: Ted Pella

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Tool 3i, Dimpling
no. 83012

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Art.Description Unit PriceQuantity
83012

Tool 3i, Dimpling

Each € 106,70
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Tool 4iT Dimpling, padded, nonwoven
no. 83016

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Art.Description Unit PriceQuantity
83016

Tool 4iT Dimpling, padded, nonwoven

Each € 106,70
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Tool 2iM padded, low nap rayon
no. 83013

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Art.Description Unit PriceQuantity
83013

Tool 2iM padded, low nap rayon

Each € 106,70
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Brand: Ted Pella

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Tool 2iT, padded, nonwoven
no. 83014

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Art.Description Unit PriceQuantity
83014

Tool 2iT, padded, nonwoven

Each € 106,70
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Large Area, Tool li, 0.125″ width
no. 83011

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Art.Description Unit PriceQuantity
83011

Large Area, Tool li, 0.125″ width

Each € 114,30
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Large Area Tool, Padded, 0.125″ width
no. 83039

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Art.Description Unit PriceQuantity
83039

Large Area Tool, Padded, 0.125″ width

Each € 144,80
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Large Area Tool, 0.25″ width
no. 83036

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Art.Description Unit PriceQuantity
83036

Large Area Tool, 0.25″ width

Each € 114,30
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Large Area Tool, padded, 0.25″ width
no. 83044

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Art.Description Unit PriceQuantity
83044

Large Area Tool, padded, 0.25″ width

Each € 160,00
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Large Area Tool, Counterbored 2 sides, 0.25″ width
no. 83038

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Art.Description Unit PriceQuantity
83038

Large Area Tool, Counterbored 2 sides, 0.25″ width

Each € 144,80
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Large Area Tool, Counterbored 2 sides, Padded, 0.25″ width
no. 83045

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Art.Description Unit PriceQuantity
83045

Large Area Tool, Counterbored 2 sides, Padded, 0.25″ width

Each € 160,00
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Large Area Tool, Counterbored 1 side, Padded, 0.25″ width
no. 83046

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Art.Description Unit PriceQuantity
83046

Large Area Tool, Counterbored 1 side, Padded, 0.25″ width

Each € 160,00
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Brand: Ted Pella

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Large Area Tool, 0.5″ width
no. 83037

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Art.Description Unit PriceQuantity
83037

Large Area Tool, 0.5″ width

Each € 208,00
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Brand: Ted Pella

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Large Area Tool, Padded, 0.5″ width
no. 83047

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Art.Description Unit PriceQuantity
83047

Large Area Tool, Padded, 0.5″ width

Each € 180,80
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Repadding Strips for li Tools
no. 83064

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Art.Description Unit PriceQuantity
83064

Repadding Strips for li Tools

10 € 35,60
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Brand: Ted Pella

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Repadding Strips for 1/8″ Large Area Tools
no. 83061

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Art.Description Unit PriceQuantity
83061

Repadding Strips for 1/8″ Large Area Tools

10 € 41,10
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Brand: Ted Pella

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Repadding Strips for 1/4″ Large Area Tools
no. 83062

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Art.Description Unit PriceQuantity
83062

Repadding Strips for 1/4″ Large Area Tools

10 € 44,40
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Brand: Ted Pella

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Repadding Strips for 1/2″ Large Area Tools
no. 83063

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Art.Description Unit PriceQuantity
83063

Repadding Strips for 1/2″ Large Area Tools

10 € 62,00
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Brand: Ted Pella

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Repadding Roller Tool Kit
no. 83060

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Art.Description Unit PriceQuantity
83060

Repadding Roller Tool Kit

10 € 172,10
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Brand: Ted Pella

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1507 DE Zaandam

Tel :+31 75 614 90 40
E-mail  :info@loeneninstruments.com

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KvK nr. :28038099

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