Specifications |
|
|---|---|
| Chamber Size: | 150mm OD x 165mm high (5.9" x 6.5") standard Variable height, 165mm - 250mm (6.5" - 9.8") optional |
| Evaporation source: | Bradley type (6.15mm OD rods [1/4"]) Heavy duty stainless construction |
| Evaporation supply: | Microprocessor based Feedback loop controlled with remote current/voltage sensing Safety interlocked Variable, 180A max. with over-current protection |
| Sample stage: | Static table holds 12 SEM 1/2" stubs Height adjustment through 60mm Optional rotary-planetary-tilting stage |
| Analog metering: | Vacuum, dual range Atm - 0.001mb 1 x 10-3 to 5 x 10-6mb Current, 0 - 200A |
| Control method: | Automatic evaporation control using programmed voltage and timer Full manual override with pulsed or continuous operation Digital timer, 1 - 9.9 seconds Digital voltage setting, 0.1 - 5.5V Automatic vent |
Pumping system |
|
| Configuration: | Turbo/rotary pump combination Optional Dry Scroll Pump instead of rotary pump |
| Pumping speed: | 80 l/sec. |
| Pumpdown Time: | 1.5 min. to 1 x 10-4mb |
| Ultimate pressure | 1 x 10-6mb |
| Desktop system: | Rotary pump is mounted on desktop compatible anti-vibration table All metal vacuum coupling system |
Services Required |
|
| Electrical: | 200-240VAC, 50/60Hz |
| Power: | 1200VA max. |
| Argon gas: | Purity, min. 99.995% Pressure regulated 5 - 6 psi (0.4 bar) Hose connection, 6.0mm (1/4") ID hose |
System Dimensions |
|
| Size: | Width 600mm, Depth 600mm, Height 300mm |
| Weight: | 45kg (with rotary pump) |
Specifications for the Accessories |
|
Auxiliary Power Unit Specifications (APU) |
|
| Control | Microprocessor controlled with automatic detection of accessory and automatic ranging of operating parameters |
| Connection | Multi-pin “smart” cable |
| Ranges: | LT for Metal Evaporation and Aperture Cleaning HT for Glow Discharge |
| Current LT: | Max. 100A |
| Timer LT: HT: |
1 – 45 sec 1-99 sec |
| Analog Display LT: HT: |
0-100A 0-20mA |
| Digital Display LT: HT: |
0-99sec 5/10/15mA |
| Mains Supply: | 230V / 5A |
| Size (WxHxD): | 246 x 156 x 300mm |
| Weight: | 14kg |
Metal Evaporation Unit Specifications |
|
| Control: | APU |
| Connection: | Multi-pin “smart” cable |
| Source Holder: | 50mm (2") filaments or baskets with integrated shielding and shutter |
| Shutter control: | Manual |
| Mounting: | Top plate mount adjacent to carbon source |
| Size: | ø90 x 130mm |
| Weight: | 0.9kg |
Glow Discharge Unit Specifications |
|
| Control: | APU |
| Connection: | Multi-pin “smart” cable |
| Source Holder: | 50mm (2") boats |
| Mounting: | Includes top plate for 208C chamber |
| Size: | ø165 x 125mm |
| Weight: | 1.3kg |
